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Raman study on dislocation in high Al content AlxGa1−xN
Published online by Cambridge University Press: 29 March 2012
Abstract
The high Al content AlGaN epilayers have been obtained by metalorganic chemical vapor deposition (MOCVD), and the optical property has been investigated by photoluminescence (PL) spectroscopy. Longitudinal-optic (LO) phonon mode has been studied by Raman scattering. Further analysis shows that the edge dislocation is an important factor influencing optical quality of AlGaN epilayers, and it also shows that the correlation between the A1 (LO) polar modes and the edge dislocation is intensive, which may be expected to become a characterization method of the related crystal defects.
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- © EDP Sciences, 2012
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