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Microwave plasmas at atmospheric pressure:theoretical insight and applications in surface treatment

Published online by Cambridge University Press:  19 March 2008

T. Belmonte ,
R. P. Cardoso ,
C. Noël ,
G. Henrion  and
F. Kosior
T. Belmonte*
Affiliation:
Laboratoire de Science et Génie des Surfaces, Nancy-Université, CNRS, Parc de Saurupt, CS 14234, 54042 Nancy Cedex, France
R. P. Cardoso
Affiliation:
Laboratoire de Science et Génie des Surfaces, Nancy-Université, CNRS, Parc de Saurupt, CS 14234, 54042 Nancy Cedex, France
C. Noël
Affiliation:
Laboratoire de Science et Génie des Surfaces, Nancy-Université, CNRS, Parc de Saurupt, CS 14234, 54042 Nancy Cedex, France
G. Henrion
Affiliation:
Laboratoire de Science et Génie des Surfaces, Nancy-Université, CNRS, Parc de Saurupt, CS 14234, 54042 Nancy Cedex, France
F. Kosior
Affiliation:
Laboratoire de Science et Génie des Surfaces, Nancy-Université, CNRS, Parc de Saurupt, CS 14234, 54042 Nancy Cedex, France
*
thierry.belmonte@mines.inpl-nancy.fr
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Abstract

This work is an assessment of recent developments on microwave plasmas at atmospheric pressure and their applications in the field of surface treatment. A special attention is paid to the question of the accuracy of data at high temperature (above 2000 K) and to the non-locality of the energy dissipation in argon and helium plasmas.

Keywords

Type
Research Article
Information
The European Physical Journal - Applied Physics , Volume 42 , Issue 1: 16th International Colloquium on Plasma Processes (CIP 2007) , April 2008 , pp. 41 - 46
Copyright
© EDP Sciences, 2008

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