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From photon emission microscopy to Raman spectroscopy: Failure analysis in microelectronics

Published online by Cambridge University Press:  15 July 2004

I. De Wolf  and
M. Rasras
I. De Wolf*
Affiliation:
IMEC, Kapeldreef 75, B-3001, Leuven, Belgium
M. Rasras
Affiliation:
Now at Lucent Technologies, Bell Laboratories, Murray Hill, NJ, USA
*
dewolfi@imec.be
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Abstract

This paper discusses two techniques that have, at first sight, completely different applications: photon emission microscopy (PEM) and micro-Raman spectroscopy (μRS). We explain the principles of these techniques, their application domain, and we will show that they can in some cases offer complementary information, and be applied to common or similar problems.

Keywords

Type
Research Article
Information
The European Physical Journal - Applied Physics , Volume 27 , Issue 1-3: Tenth International Conference on Defects: Recognition, Imaging and Physics in Semiconductors (DRIP X) , July 2004 , pp. 59 - 65
Copyright
© EDP Sciences, 2004

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References

Chynoweth, A. G., Mckay, K. G., Phys. Rev. 102, 369 (1956) CrossRef
N. Khurana, in Proceedings of the Int. Reliability Physics Symp. 1984, p. 122
N. Khurana, T. Maloney, W. Yeh. in Proceeding of IEEE/IRPS 1985, p. 212
Kolzer, J., Boit, C., Dallman, A., Deboy, G., Otto, J., D. Weinmann. J. Appl. Phys. 71, R23–R41 (1992) CrossRef
M. Cardona, in Proceedings SPIE 822, 1987, p. 2
Zeiss GmbH, Tech. Report MEG-M/Dnz/10.09.(1997)
Y. Y. Liu, J. M. Tao, D. S. H. Chang, J. C. H. Phang, W. K. Chim, in Proc. Int. Symp. Physical and failure analysis of integrated circuits (IPFA) 1995, p. 60
K. de Kort, P. Damink. in IEEE Proc. Int. Rel. Phys. Symp (IRPS), 1996, p. 360 1cm
M. Rasras, Reliability study and failure analysis of semiconductor devices using spectroscopic photon emission microscopy, Ph.D., Katholic University Leuven, Physics Dept/IMECvzw, July 2000
I. De Wolf, M. Rasras, United States Patent 6,043,882. Emission microscope and method for continuous wavelength spectroscopy
Rasras, M., De Wolf, I., Groeseneken, G., Maes, H. E., Microelectron. Reliab. 37, 1595 (1997) CrossRef
De Wolf, I., Howard, D. J., Rasras, M., Lauwers, A., Maex, K., Groeseneken, G., Maes, H. E., Microelectron. Reliab. 37, 1591 (1997) CrossRef
M. Rasras, I. De Wolf, G. Groeseneken, J. Chen, K. Bock, H. E. Maes, Proc. of the 25th International Symposium for testing and failure analysis, ISTFA 1999 (ASM International), pp. 69–76, 1999
C. Russ, K. Bock, M. Rasras, I. De Wolf, G. Groeseneken, H. E. Maes, in Proc. EOS/ESD Symp., pp. 177–186, 1998