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Fabrication of point contacts by FIB patterning

  • B. O'Gorman (a1) (a2) (a3) and M. Tsoi (a1) (a2) (a3)

Abstract

We describe a new technique for the fabrication of point contacts using a focused ion beam (FIB) patterning. After sample coverage with a thin insulating layer (SiO), an FIB is used to mill a 100-nm-diameter hole through the insulator. Electrical contact to the sample is then made in-situ by filling the hole with a metal (Pt) using the ion beam assisted chemical vapor deposition capability of our FIB system. We have demonstrated the use of two such contacts (as an emitter and collector) in a transverse electron focusing (TEF) experiment. The contacts were made to a single crystal of bismuth, ballistic electrons were injected into the crystal through the emitter contact and then focused onto the collector by a magnetic field. We see the expected voltage peaks at the collector as a function of the applied magnetic field. Temperature dependent TEF measurements provided direct information about relaxation time of conduction electrons.

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References

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[1] Sharvin, Y.V., Zh. Eksp. Teor. Fiz. 48, 984 (1965) [Sov. Phys. JETP 21, 655 (1965)]
[2] Tsoi, V.S., Pis'ma Zh. Eksp. Teor. Fiz. 19, 114 (1974) [JETP Lett. 19, 70 (1974)]
[3] Tsoi, V.S., Bass, J., Wyder, P., Rev. Mod. Phys. 71, 1641 (1999)
[4] Jansen, A.G.M., Van Gelder, A.P., Wyder, P., J. Phys. C 13, 6073 (1980)
[5] Y.G. Naidyuk, I.K. Yanson, Point-contact spectroscopy (Springer, New-York, 2004)
[6] Tsoi, M., Jansen, A.G.M., Bass, J., Chiang, W.-C., Seck, M., Tsoi, V., Wyder, P., Phys. Rev. Lett. 80, 4281 (1998)
[7] Tsoi, M., Jansen, A.G.M., Bass, J., Chiang, W.-C., Tsoi, V., Wyder, P., Nature (London) 406, 46 (2000)
[8] Jaeger, M.D., Tsoi, V., Golding, B., Appl. Phys. Lett. 68, 1282 (1996)
[9] For an overview of FIB, see J. Orloff, M. Utlaut, L. Swanson, High Resolution Focused Ion Beams: FIB and Its Applications (Kluwer Academic/Plenum Publishers, New York, 2003)
[10] Sharvin, Y.V., Gantmakher, V.F., Prib. Tekh. Eksp. 15, 101 (1963)
[11] N.W. Ashcroft, N.D. Mermin, Solid State Physics (Saunders, Philadelphia, 1976)
[12] Tsoi, M., Tsoi, V., Wyder, P., JETP Lett. 64, 891 (1996)

Keywords

Fabrication of point contacts by FIB patterning

  • B. O'Gorman (a1) (a2) (a3) and M. Tsoi (a1) (a2) (a3)

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