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Effect of Ar annealing temperature on SiO2/SiC:SiO2 densification change causing leakage current reduction

Published online by Cambridge University Press:  30 April 2013

Zhi Qin Zhong*
Affiliation:
State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, P.R. China
Zi Jiao Sun
Affiliation:
State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, P.R. China
Shu Ya Wang
Affiliation:
State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, P.R. China
Li Ping Dai
Affiliation:
State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, P.R. China
Guo Jun Zhang
Affiliation:
State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, P.R. China
*
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Abstract

The authors investigated the effects of annealing in Ar atmosphere at different temperatures (350–1100 °C) on the densification and leakage current characteristics of thermally oxidized SiO2 films on n-type 4H-SiC. A strong correlation between densification improvement and leakage current reduction was observed. Densification of the SiO2 films, which were characterized by spectroscopic ellipsometry, Fouriertransform infrared spectroscopy and atomic force microscopy, can be significantly improved after annealing at moderate temperature (600 °C). The leakage current is decreased by two orders of magnitude of the SiO2 thin film after annealing at 600 °C. Based on the studies, SiO2 film of the highest quality can be obtained after annealing at 600 °C. Improvements in the quality of the SiO2 thin films after annealing at 600 °C may be explained by the consumption and formation of carbon-related and oxygen-related defects during annealing.

Type
Research Article
Copyright
© EDP Sciences, 2013

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