The smallest dark matter halos are formed first in the early universe. According to recent studies, the central density cusp is much steeper in these halos than in larger halos and scales as ρ ∝ r−(1.5−1.3). We present results of very large cosmological N-body simulations of the hierarchical formation and evolution of halos over a wide mass range, beginning from the formation of the smallest halos. We confirmed early studies that the inner density cusps are steeper in halos at the free streaming scale. The cusp slope gradually becomes shallower as the halo mass increases. The slope of halos 50 times more massive than the smallest halo is approximately -1.3. The concentration parameter is nearly independent of halo mass, and ruling out simple power law mass-concentration relations. The steeper inner cusps of halos near the free streaming scale enhance the annihilation luminosity of a Milky Way sized halo between 12 to 67%.