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Omega–Phi compensated GID in side inclination mode for measurement of residual stress in polycrystalline thin films

  • Xiaodong Wang (a1) and Arie van Riessen (a2)


The grazing incidence diffraction (GID) method in side inclination mode, described by Ma et al. in 2002, of polycrystalline thin-film residual stress was revisited and explained using simple geometric relations. To overcome the issue of decreasing peak intensity of this method, which is induced by the decreasing incident angle because of the Eulerian cradle Chi-tilt, an improvement of Omega (ω)–Phi (φ) compensation was devised and applied to a NiFe thin-film sample. The geometry of this improved ωφ compensated GID method in side inclination mode is detailed in this paper. This improvement guarantees a constant incident angle on the sample surface and a fixed sample illumination volume during measurement. The measured data were analysed using parametric refinement in DIFFRAC.TOPAS v6 software in Launch Mode, and details of the input file (.INP) are explained in this paper. The tensile stress of the NiFe thin-film sample was measured to be 1181 ± 85 MPa using this improved method.


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Evans, J. S. O. (2010). “Advanced input files & parametric quantitative analysis using Topas,” Mater. Sci. Forum 651, 19.
Genzel, C. H. (2005). “X-ray residual stress analysis in thin films under grazing incidence – basic aspects and applications,” Mater. Sci. Technol. 21, 1018.
Ma, C.-H., Huang, J.-H., and Chen, H. (2002). “Residual stress measurement in textured thin film by grazing-incidence X-ray diffraction,” Thin Solid Films 418, 7378.
Marciszko, M., Baczmański, A., Wróbel, M., Seiler, W., Braham, C., Donges, J., Śniechowski, M., and Wierzbanowski, K. (2013). “Multireflection grazing incidence diffraction used for stress measurements in surface layers,” Thin Solid Films 530, 8184.
Stinton, G. W. and Evans, J. S. O. (2007). “Parametric Rietveld refinement,” J. Appl. Crystallogr. 40, 8795.
Wang, A.-N., Chuang, C.-P., Yu, G.-P., and Huang, J.-H. (2015a). “Determination of average X-ray strain (AXS) on TiN hard coatings using cos2 α sin2ψ X-ray diffraction method,” Surf. Coat. Technol. 262, 4047.
Wang, A.-N., Huang, J.-H., Hsiao, H.-W., Yu, G.-P., and Chen, H. (2015b). “Residual stress measurement on TiN thin films by combining nanoindentation and average X-ray strain (AXS) method,” Surf. Coat. Technol. 280, 4349.



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