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F-66 Investigation of Spin-Coated Inorganic Contamination on Si Surfaces by Various Analytical Techniques

  • B. Beckhoff (a1), M. Kolbe (a1), M. Müller (a1), A. Nutsch (a2), R. Altmann (a2), G. Borionetti (a3), C. Pello (a3), M. L. Polignano (a4), D. Codegoni (a4), S. Grasso (a4), E. Cazzini (a4), M. Bersani (a5), P. Lazzeri (a5), S. Gennaro (a5), P. Kregsamer (a6) and F. Posch (a6)...

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F-66 Investigation of Spin-Coated Inorganic Contamination on Si Surfaces by Various Analytical Techniques

  • B. Beckhoff (a1), M. Kolbe (a1), M. Müller (a1), A. Nutsch (a2), R. Altmann (a2), G. Borionetti (a3), C. Pello (a3), M. L. Polignano (a4), D. Codegoni (a4), S. Grasso (a4), E. Cazzini (a4), M. Bersani (a5), P. Lazzeri (a5), S. Gennaro (a5), P. Kregsamer (a6) and F. Posch (a6)...

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