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Crystal structures and magnetic properties of Fe–N thin films deposited by dc magnetron sputtering

  • Wei Tao Zheng (a1), Xin Wang (a2), Xianggui Kong (a3), Hongwei Tian (a1), Shansheng Yu (a1), Zhudi Zhao (a1) and Xiaotian Li (a1)...

Abstract

Fe–N thin films were deposited on glass substrates by dc magnetron sputtering under various Ar∕N2 discharge conditions. Crystal structures and elemental compositions of the films were characterized by X-ray diffraction and X-ray photoelectron spectroscopy. Magnetic properties of the films were measured using a superconducting quantum interference device magnetometer. Films deposited at different N2∕(Ar+N2) flow ratios were found to have different crystal structures and different nitrogen contents. When the flow ratios were 60%, 50%, and 30%, a nonmagnetic single-phase FeN was formed in the films. At the flow ratio of 10%, two crystal phases of γ′-Fe4N and ε-Fe3N were detected. When the flow ratio reduced to 5%, a mixture of α-Fe, ε-Fe3N, FeN0.056, and α″-Fe16N2 phases was obtained. The value of saturation magnetization for the mixture was found to be larger than that of pure Fe.

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a)Electronic mail: wtzheng@jlu.edu.cn

References

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Keywords

Crystal structures and magnetic properties of Fe–N thin films deposited by dc magnetron sputtering

  • Wei Tao Zheng (a1), Xin Wang (a2), Xianggui Kong (a3), Hongwei Tian (a1), Shansheng Yu (a1), Zhudi Zhao (a1) and Xiaotian Li (a1)...

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