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Crystal structures and magnetic properties of Fe–N thin films deposited by dc magnetron sputtering

  • Wei Tao Zheng (a1), Xin Wang (a2), Xianggui Kong (a3), Hongwei Tian (a1), Shansheng Yu (a1), Zhudi Zhao (a1) and Xiaotian Li (a1)...


Fe–N thin films were deposited on glass substrates by dc magnetron sputtering under various Ar∕N2 discharge conditions. Crystal structures and elemental compositions of the films were characterized by X-ray diffraction and X-ray photoelectron spectroscopy. Magnetic properties of the films were measured using a superconducting quantum interference device magnetometer. Films deposited at different N2∕(Ar+N2) flow ratios were found to have different crystal structures and different nitrogen contents. When the flow ratios were 60%, 50%, and 30%, a nonmagnetic single-phase FeN was formed in the films. At the flow ratio of 10%, two crystal phases of γ′-Fe4N and ε-Fe3N were detected. When the flow ratio reduced to 5%, a mixture of α-Fe, ε-Fe3N, FeN0.056, and α″-Fe16N2 phases was obtained. The value of saturation magnetization for the mixture was found to be larger than that of pure Fe.


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Borsa, D. M., Grachev, S., Kerssemakers, J. W. J., and Boerma, D. O. (2002). “Development of an all-nitride magnetic tunnel junction,” J. Magn. Magn. Mater. JMMMDC 240, 445.
Cocke, D. L., Rajman, M. J., and Veprek, S. (1989). “The surface properties and reactivities of plasma-nitrided iron and their relation to corrosion passivation,” J. Electrochem. Soc. JESOAN 136, 3655.
Chumakov, A. I., Smimov, G. V., Baron, A. Q. R., Arthur, J., Brown, D. E., Ruby, S. L., Brown, G. S., and Salashehenko, N. N. (1993). “Resonant diffraction of synchrotron radiation by a nuclear multiplayer,” Phys. Rev. Lett. PRLTAO 10.1103/PhysRevLett.71.2489 71, 2489.
Coey, J. M. D. (1994). “The magnetization of bulk α′Fe16N2 (invited),” J. Appl. Phys. JAPIAU 10.1063/1.358156 76, 6632.
Gupta, M., Gupta, A., and Bhattacharya, P. (2001a). “Study of iron nitride thin films deposited by pulsed laser deposition,” J. Alloys Compd. JALCEU 10.1016/S0925-8388(01)01316-0 326, 265.
Gupta, M., Gupta, A., and Chaudhari, S. M. (2001b). “Microstructural study of iron nitride thin films deposited by ion beam sputtering,” Vacuum VACUAV 10.1016/S0042-207X(00)00148-2 60, 395.
Jacobs, H., Rechenbach, D., and Zachwieja, U. (1995). “Structure determination of γ′-Fe4N and ε-Fe3N,” J. Alloys Compd. JALCEU 227, 10.
Kim, T. K. and Takahashi, M. (1972). “New magnetic material having ultrahigh magnetic moment,” Appl. Phys. Lett. APPLAB 10.1063/1.1654030 20, 492.
Mohm, P. and Matar, S. F. (1999). “The γ-Fe4N system revisited: An ab initio calculation study of the magnetic interactions,” J. Magn. Magn. Mater. JMMMDC 10.1016/S0304-8853(98)00312-6 191, 234.
Ortiz, C., Dumpich, G., and Morrish, A. H. (1994). “Epitaxial Fe16N2 films grown by sputtering,” Appl. Phys. Lett. APPLAB 10.1063/1.112552 65, 2737.
Rohlsberger, R., Witthoff, E., Gerdau, E., and Loken, E. (1993). “Observation of nuclear diffraction from multilayers with a Fe∕57Fe superstructure,” J. Appl. Phys. JAPIAU 10.1063/1.354776 74, 1933.
Rissanen, L., Neubauer, M., and Lieb, K. P. (1998). “The new cubic iron-nitride phase FeN prepared by reactive magnetron sputtering,” J. Alloys Compd. JALCEU 10.1016/S0925-8388(98)00594-5 274, 74.
Rissanen, L., Schaaf, P., and Neubauer, M. (1999). “The production of the new cubic FeN phase by reactive magnetron sputtering,” Appl. Surf. Sci. ASUSEE 138/139, 261.
Sugita, Y., Takahashi, H., and Komuro, M. (1994). “Magnetic and Mossbauer studies of single-crystal Fe16N2 and Fe-N martensite films epitaxially grown by molecular beam epitaxy,” J. Appl. Phys. JAPIAU 10.1063/1.358157 76, 6637.
Takahashi, M. and Shoji, H. J. (2000). “α″-Fe16N2 problem - giant magnetic moment or not,” J. Magn. Magn. Mater. JMMMDC 208, 145157.


Crystal structures and magnetic properties of Fe–N thin films deposited by dc magnetron sputtering

  • Wei Tao Zheng (a1), Xin Wang (a2), Xianggui Kong (a3), Hongwei Tian (a1), Shansheng Yu (a1), Zhudi Zhao (a1) and Xiaotian Li (a1)...


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