Several kinds of zeolites, crystal-SiO2 (α-quartz), arnorphous-SiO2 (quartz glass and ultrafine particles) and α-Al2O3, were ablated by an Nd:YAG laser. Generated positive ions from the targets were measured by TOF-MS (time-of-flight mass spectrometry). In the TOF mass spectra of ablated zeolites, TOx (x=0–2, T = tetrahedral atom, e.g., Si, Al), T2Ox (x=1) and T3Ox (x=4,5) were observed up to m/z=170 (m = mass, z = plus charge of clusters). In the spectra due to the oc-quartz, quartz glass and an α-Al2O3 plate, smaller species, T+, TO+ and TO2
+, were mainly detected. These results demonstrate that the clusters from zeolites reflect the characters of the mother structure.