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Optimization of Process Parameter and Temperature Uniformity On Wafers For Rapid Thermal Processing
- Published online by Cambridge University Press: 15 February 2011, 3
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Transient And Spatial Radiative Properties Of Patterned Wafers During Rapid Thermal Processing
- Published online by Cambridge University Press: 15 February 2011, 15
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The Potential Effect of Multilayer Patterns on Temperature Uniformity During Rapid Thermal Processing
- Published online by Cambridge University Press: 15 February 2011, 21
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Emissivity Of Rough Silicon Surfaces: Measurement And Calculations
- Published online by Cambridge University Press: 15 February 2011, 29
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A New Flexible Rapid Thermal Processing System
- Published online by Cambridge University Press: 15 February 2011, 35
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In-Situ resistance Measurements During Rapid Thermal Annealing for Process Characterization
- Published online by Cambridge University Press: 15 February 2011, 49
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An Analytic Approach to the Radiation Fields of Tubular Halogen Lamp Arrangements in RTP Reactor Blocks
- Published online by Cambridge University Press: 15 February 2011, 55
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Application of a Neural Manufacturing Concept to Process Modeling, Monitoring and Control
- Published online by Cambridge University Press: 15 February 2011, 61
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Design-Coupled Manufacturing
- Published online by Cambridge University Press: 15 February 2011, 67
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Concurrent Design of an RTP Chamber and Advanced control system
- Published online by Cambridge University Press: 15 February 2011, 75
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Modeling, Simulation and Control of Single Wafer Process in Cluster Tool Base on Ft-Ir In-Line Sensor
- Published online by Cambridge University Press: 15 February 2011, 87
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Monte-Carlo simulation of the deposition process in PVD-technology
- Published online by Cambridge University Press: 15 February 2011, 93
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1D and 2D Monte Carlo Simulations of Pulsed Laser Ablation Of Si/Ga Into Ar/O2 With A Substrate
- Published online by Cambridge University Press: 15 February 2011, 101
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Simulation of Uniformity and Lifetime Effects in Collimated Sputtering
- Published online by Cambridge University Press: 15 February 2011, 107
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The Effects of Collimator Life Time on the Ti and Tin Film Growth Rates and Conformalities in Sputter Deposition Processes: Experiments and Simulations
- Published online by Cambridge University Press: 15 February 2011, 113
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Application of Ripple Pyrometry on Integra Rapid Thermal CVD Cluster Tools
- Published online by Cambridge University Press: 15 February 2011, 119
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Sub-Feature Speckle Interferometry: A New Approach To Temperature Measurement
- Published online by Cambridge University Press: 15 February 2011, 125
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In-Line Temperature Monitoring of Rapid Thermal Annealing Processes
- Published online by Cambridge University Press: 15 February 2011, 131
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Low Temperature (≥ 400°C) Silicon Pyrometry AT 1.1μm with Emissivity Correction
- Published online by Cambridge University Press: 15 February 2011, 137
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Monte Carlo Simulation of Optical Temperature Sensors in RTP Systems
- Published online by Cambridge University Press: 15 February 2011, 143
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