Symposium B – Materials Science of Microelectromechanical Systems (MEMS) Devices IV
Research Article
Strength Analysis of a Micro-Rocket Combustion Chamber
- Published online by Cambridge University Press: 15 March 2011, B4.6
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Fabrication of Piezoelectric Diaphragm Using Lead Zirconate Titanate (PZT) Films
- Published online by Cambridge University Press: 15 March 2011, B5.16
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Mechanisms of Fatigue in Polysilicon Mems Structures
- Published online by Cambridge University Press: 15 March 2011, B2.3
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The Fabrication of Stainless Steel Parts for MEMs
- Published online by Cambridge University Press: 15 March 2011, B5.19
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Piezoelectric Shear Mode Inkjet Actuator
- Published online by Cambridge University Press: 15 March 2011, B1.4
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Neutron Irradiation-Induced Dimensional Changes in MEMS Glass Substrates
- Published online by Cambridge University Press: 15 March 2011, B5.17
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Design and Modelling of a Fourier Spectrometer Based on Sampling a Standing Wave
- Published online by Cambridge University Press: 15 March 2011, B5.39
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Mechanical Testing of Free-Standing Thin Films
- Published online by Cambridge University Press: 15 March 2011, B10.6/P6.6
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Mechanical Properties of Thin Film Silicon Carbide
- Published online by Cambridge University Press: 15 March 2011, B6.3
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The Materials Science of “Permeable Polysilicon” Thin Films
- Published online by Cambridge University Press: 15 March 2011, B7.3
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A Constitutive Model for the Mechanical Behavior of Single Crystal Silicon at Elevated Temperature
- Published online by Cambridge University Press: 15 March 2011, B9.6
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Fabrication of MEMS Tonpilz Transducers
- Published online by Cambridge University Press: 15 March 2011, B5.22
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Charge Transport in Low Stress Si-rich Silicon Nitride Thin Films
- Published online by Cambridge University Press: 15 March 2011, B5.11
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Microsensors for Automotive Applications – Metrology and Test
- Published online by Cambridge University Press: 15 March 2011, B1.1
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Characteristics of Thick Sol-Gel Lead Zirconate Titanate Films for Angular Rate Sensor Application
- Published online by Cambridge University Press: 15 March 2011, B5.46
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Aluminum-Silicon and Gold-Silicon Eutectics: New Opportunities for MEMS Technologies
- Published online by Cambridge University Press: 15 March 2011, B5.5
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New MEMS Technology Using Multi-Layer NILC Poly-Si and NiSi Films
- Published online by Cambridge University Press: 15 March 2011, B5.24
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Micromachined Nanoparticulate Ceramic Gas Sensor Array on Mems Substrates
- Published online by Cambridge University Press: 15 March 2011, B4.5
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Electrofluidic Assembly of Nanoelectromechanical Systems
- Published online by Cambridge University Press: 15 March 2011, B4.4
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Mechanical Properties of 0.1 Micron Thick Simox Film Measured Using on-Chip Tensile Test System
- Published online by Cambridge University Press: 15 March 2011, B8.3
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