Skip to main content Accessibility help
×
Home

Zinc Oxide Thin Films used as an Ozone Sensor at Room Temperature

  • Ana Claudia Pimentel (a1), Alexandra Gonçalves (a2), António Marques (a3), Rodrigo Martins (a4) and Elvira Fortunato (a5)...

Abstract

In this paper we present results of intrinsic/non doped zinc oxide deposited at room temperature by rf magnetron sputtering able to be used as a semiconductor material on electronic devices, like for example ozone gas sensors and ultra-violet detectors. The produced films are polycrystalline with a c-axis preferential orientation parallel to the substrate. The films present a resistivity that varies from 4.0×10−2 Ωcm to 1.0×109 Ωcm depending on the deposition conditions used in this study (rf power density and oxygen partial pressure) without changing the optical properties (an average transmittance of 85 % and an optical band gap energy ≈3.44 eV). When exposed to UV light the sensor response exceeds more than 5 orders of magnitude recovering to the initial state in the presence of ozone. The sensitivity of the films is improved when the oxygen partial pressure increases and the rf power density decreases which are directly related to the structural properties of the films.

Copyright

References

Hide All
1 Bunn, C. W., Proc. Phys. Soc. London 47, 835 (1935).
2 Pearton, S., Norton, D., Ip, K., Heo, Y., Steiner, T., Superlattices and Microstructurse, 34 (2004) 3.
3 Shibata, T., Unno, K., Makino, E., Ito, Y., Shimada, S., Sensors and Actuators A, 102 (2002) 106.
4 Fortunato, E., Barquinha, P., Pimentel, A., Pereira, L., Gonçalves, A., Marques, A., Martins, R.. Applied Physics Letters, 85 (2004) 2541.
5 Martins, R., Igreja, R., Ferreira, I., Marques, A., Pimentel, A., Gonçalves, A., Fortunato, E., Materials Science & Engineering B, 118 (2005) 135.
6 Bender, M., Fortunato, E., Nunes, P., Ferreira, I., Marques, A., Martins, R., Katsarakis, N., Cimalla, V., Kiriakidis, G.. Jpn. Journal of Applied Physics Letters, 42, L435 (2003); R. Martins, E. Fortunato, P. Nunes, I. Ferreira, A. Marques, M. Bender, N. Katsarakis, V. Cimalla, and G. Kiriakidis. J. Appl. Physics, 96, 1398 (2004).
7 Fortunato, E., Pimentel, A., Pereira, L., Gonçalves, A., Lavareda, G., Águas, H., Ferreira, I., Carvalho, C.N., Martins, R., Journal of Non-Crystalline Solids, 338–340 (2004) 806.
8 Tan, S., Chen, B., Sun, X., Hu, X., Zhang, X., Chua, S., Journal of Crystal Growth, Article in press.
9 Berber, M., Bulto, V., Klib, R., Hahn, H., Scripta Materialia, Article in press.
10 Li, Z., Gao, W., Reeves, R., Surface & Coatings Technology, 198 (2005) 319.
11 Kang, D., Kim, J., Jeong, S.. Roh, Y., Jeong, S., Boo, J., Thin Solid Films, 475 (2005) 160.
12 Lin, S., Huang, J., Surface & Coatings Technology, 185 (2004) 222.
13 Ellmer, K., J. Phys. D: Appl. Phys., 33 (2000) R17.
14 Cullity, B., Elements of X-ray Diffraction, 2nd, Addison-Wesley, 1978, page 102.

Keywords

Zinc Oxide Thin Films used as an Ozone Sensor at Room Temperature

  • Ana Claudia Pimentel (a1), Alexandra Gonçalves (a2), António Marques (a3), Rodrigo Martins (a4) and Elvira Fortunato (a5)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed