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Published online by Cambridge University Press: 28 February 2011
A nitrate solution of Y, Ba and Cu was atomized and introduced into an inductively coupled argon ‐ oxygen plasma operated at 4.4 kW and 13.56 MHz under atmospheric pressure. As‐deposited superconducting films were grown on (100) YSZ substrates heated to 650°C. Critical temperatures of 85 K and critical current densities of 7.0 x 104 amp/cm2 at 77 K have been achieved. X‐ray diffraction shows the films to be oriented with the c‐axis perpendicular to the substrate surface. The effects of process parameters, solution composition, and aerosol concentration on the superconducting properties and microstructures will be discussed.