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X-Ray Microanalysis of Al/Zr Multilayers in the Transmission Electron Microscope

Published online by Cambridge University Press:  10 February 2011

M. A. Wall ,
T. W. Barbee Jr  and
J. Bentley
M. A. Wall
Affiliation:
L-350, Chemistry & Materials Science Department, Lawrence Livermore National Laboratory, 7000 East Ave., Livermore, CA USA 94550
T. W. Barbee Jr
Affiliation:
L-350, Chemistry & Materials Science Department, Lawrence Livermore National Laboratory, 7000 East Ave., Livermore, CA USA 94550
J. Bentley
Affiliation:
Metals and Ceramics Division, Oak Ridge National Laboratory, PO Box Oak Ridge, TN 37831
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Abstract

A one-nanometer scale transmission electron microscope electron probe X-ray microanalysis characterization of as-deposited and annealed aluminum - 11.5 at.% zirconium multilayer samples in cross-section synthesized by magnetron sputtering is reported on here. Composition line profiles were acquired across Zr layers in as-deposited material and samples isochronnally annealed in a differential scanning calorimeter to temperatures of 290°C and 485°C. A spatial resolution of approximaty 1.5 to 2.0 nm was achieved in these experiments and will be improved by deconvoluti on of the instrumental electron probe function from the data. The as-deposited structure consisted of crystalline Al and Zr layers with thin amorphous layers at the Al/Zr interfaces. The amorphous interface layers increased in thickness upon annealing to 290°C. Additionally, at 290”C a metastable cubic alloy forms at the Zr deposited on Al interface. Upon heating to 485°C a multilayer of Al and metastable cubic AlxZr1-x phase is formed. The electron microscopic experimental technique, observations and data analysis will be discussed as applied to these multilayered materials.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 472: Symposium I – Polycrystalline Thin Films - Structure, Texture, Properties..III , 1997 , 125
Copyright
Copyright © Materials Research Society 1997

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