Skip to main content Accessibility help
×
Home

X-Ray Diffuse Scattering Investigation of Defects in Ion Implanted and Annealed Silicon

  • C. H. Chang (a1) (a2), U. Beck (a3), T. H. Metzger (a3) and J. R. Patel (a1) (a2)

Abstract

To characterize the point defects and point defect clusters introduced by ion implantation and annealing, we have used grazing incidence x-rays to measure the diffuse scattering in the tails of Bragg peaks (Huang Scattering). An analysis of the diffuse scattered intensity will allow us to characterize the nature of point defects or defect clusters introduced by ion implantation. We have also observed unexpected satellite peaks in the diffuse scattered tails. Possible causes for the occurrence of the peaks will be discussed.

Copyright

References

Hide All
1. Fahey, P. M., Griffm, P. B. and Plummer, J. D., Rev. Mod. Physics 61, 289 (1989)
2. Gossmann, H-J., Rafferty, C. S., Luftmann, H. S., Unterwald, F. C., Boone, T. and Poate, J. M., Appl. Phys. Lett. 63, 639 (1993)
3. Michel, A. E., Rausch, W., Ronsheim, P. A. and Kastl, R. H., Appl. Phys. Lett. 50,417 (1989)
4. Pelaz, L., Gilmer, G. H., Jaraiz, M., Gossmann, H-J., Rafferty, C.S., Eaglesham, D.J., and Poate, J.M., Mat. Res. Soc. Symp. Vol.469, 341 (1997)
5. Giles, M. D., Yue, S., Kennel, H. W., and Packan, P.A., Mat. Res. Soc. Symp. Proc. Vol.469, 253, (1997)
6. Ehrhart, P. , J. Nucl. Mat. 216, 174 (1990)
7. Grotenhans, S., Wallner, G., Burkel, E., Metzger, H., Peisl, J. and Wagner, H., Phys. Rev. B39, 8450 (1989)
8. Nordlund, K., Patrtyka, P., and Averbach, R. S., Mat. Res. Soc. Symp. Proc. 469, 199 (1997)
9. Caturla, M-J. (Personal communication)
10. Zhu, J., Mat. Res. Soc. Proc. Vol.469, 151 (1997)
11. Caturla, M-J., Diaz de la Rubia, T., Zhu, J. and Johnson, M., Mat. Res. Soc. Symp. Vol.469, 335 (1997)

X-Ray Diffuse Scattering Investigation of Defects in Ion Implanted and Annealed Silicon

  • C. H. Chang (a1) (a2), U. Beck (a3), T. H. Metzger (a3) and J. R. Patel (a1) (a2)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed