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X-ray Determination and Analysis of Residual Stresses in Uniform Films and Patterned Lines of Tungsten

  • L. Maniguet (a1), M. Ignat (a1), M. Dupeux (a1), J.J. Bacmann (a2) and Ph. Normandon (a3)...

Abstract

The determination by X-ray diffraction of the elastic strain tensors and the corresponding stress tensors in uniform films and patterned lines of tungsten was used to investigate the effect of line width. The stresses were found to increase with increasing line width. These experimental results are discussed with respect to the values obtained from a model using a distributed force in the line. The results of the calculations are in agreement with the X-ray measurements. The edge effects appear to be significant for tungsten lines.

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8 Maniguet, L., Ignat, M., Dupeux, M., Flinn, P. A., Normandon, Ph., Gergaud, P., Bacmann, J.J.," X-ray determination of internal residual stresses in uniform films and patterned tungsten structures ",in Advanced Metalization for ULSI Applications 1992, ed. by Cale, T. S. and Pintchovski, F. S., Mat. Res. Soc. Conf. Proa, 1993, pp. 6772.

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X-ray Determination and Analysis of Residual Stresses in Uniform Films and Patterned Lines of Tungsten

  • L. Maniguet (a1), M. Ignat (a1), M. Dupeux (a1), J.J. Bacmann (a2) and Ph. Normandon (a3)...

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