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Xps Study of CdTe Surface Layers: Effects of Hydrogen

  • L Svob (a1), D. Ballutaud (a1), A. Heurtel (a1) and Y. Marfaing (a1)

Abstract

The effects of different hydrogen or equivalent deuterium treatments on CdTe superficiallayers are studied. Surface chemical analysis is performed by x-ray photoelectron spectroscopy and hydrogen profiles are controlled by secondary ion mass spectroscopy using deuterium. Hydrogen plasma etching leads to a clean and nearly stoichiometric surface, and the surface abrasion rate is higher than the hydrogen in-diffusion rate. Deuterium implantation by a Kaufman source leads to surface depleted of tellurium and prevents them from further oxidation. Annealing under deuterium gas produces a similar surface, free fromoxide, but not stable with regard to further oxidation.

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Xps Study of CdTe Surface Layers: Effects of Hydrogen

  • L Svob (a1), D. Ballutaud (a1), A. Heurtel (a1) and Y. Marfaing (a1)

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