(001) oriented (Ba, Sr)TiO3 (BST) thin films were deposited on MgO (001) single crystal substrates by the pulsed laser deposition method. Structural properties of BST films were investigated using X-ray diffractometer. Coplanar waveguide (CPW) device based on BST/MgO layer structure was fabricated by dc sputtering deposition, photolithography and etching process. To study the geometrical factor dependent microwave performance of the CPW phase shifter based on (001) oriented BST film, the CPW devices having various gap and width were fabricated. The microwave dielectric properties of BST CPW phase shifter devices were examined by calculating the scattering parameter obtained using a HP 8510C vector network analyzer with the frequency range 0.5 ∼ 20 GHz at room temperature under the dc bias field of 0 ∼ 40V. The measured return loss and insertion loss at 10 GHz with no dc bias were about -12 ∼ -4 dB and -14 ∼ -3 dB, respectively, which mainly depended on the impedances of the CPW transmission lines. The measured differential phase shift values were about 20 ° ∼ 140 ° at 10 GHz with 40 V dc bias variations, which depended on the gap size.