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Variable Angle Spectroscopic Ellipsometry (VASE) for the Study of Ion-Beam and Growth-Modified Solids*

Published online by Cambridge University Press:  25 February 2011

John A. Woollam ,
Paul G. Snyder  and
M. C. Rost
John A. Woollam
Affiliation:
Department of Electrical Engineering University of Nebraska Lincoln, NE 68588-0511
Paul G. Snyder
Affiliation:
Department of Electrical Engineering University of Nebraska Lincoln, NE 68588-0511
M. C. Rost
Affiliation:
Department of Electrical Engineering University of Nebraska Lincoln, NE 68588-0511
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Extract

In the most commonly used form of ellipsometry, a monochromatic collimated linearly polarized light beam is directed at an angle φ to the normal of a sample under study. The specularly reflected beam is, in general, elliptically polarized, and the state of polarization is analyzed using a second polarizer and photodetector.1 Figure 1 shows a schematic of the rotating analyzer automated spectroscopic ellipsometer used at the University of Nebraska. The angle of incidence can be set over a wide range of angles, with a precision and repeatability of ±0.01 angular degrees. A computer controls the monochromator, the azimuth of a stepper motor driven polarizer, a shutter, and the digitization of the detector signal. There are several other schemes used for acquiring ellipsometric data, and these are discussed in several sources.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 93: Symposium C – Materials Modification and Growth Using Ion Beams , 1987 , 203
Copyright
Copyright © Materials Research Society 1987

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Footnotes

*

Research supported by NASA Lewis Grant NAG-3-95.

References

REFERENCES

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