Skip to main content Accessibility help
×
Home

Vapor phase transport of AlN in an RF heated reactor: Low and high temperature studies

  • V. Noveski (a1) (a2), R. Schlesser (a1), J. Freitas (a3), S. Mahajan (a2), S. Beaudoin (a4) and Z. Sitar (a1)...

Abstract

AlN crystals were grown from the vapor phase in an RF heated AlN sublimation reactor. The studies were performed with the following goals: 1) to optimize the growth rate by investigating mass transfer effects, and 2) to establish a process for epitaxial growth on AlN seeds. A one-dimensional mass transfer model based on equilibrium sublimation and gas-phase diffusion was developed. Model parameters were estimated and the model was validated from growth experiments carried out in a 600 Torr nitrogen atmosphere and temperatures ranging from 2000 to 2400°C. Continuous growth on AlN seed crystals was accomplished as a result of optimizing the initial stage of growth and achieving a delicate balance between the rate of mass transfer and the rate of surface rearrangement. During this experimental study, centimeter-size single crystals of AlN were obtained within the 1.25” diameter boule that was grown at a predicted growth rate of 0.1–0.3 mm/hr, at 500 Torr of nitrogen, short source-to-seed distance, low supersaturation and growth temperatures of 2110–2140°C. Chemical analysis of impurities in the grown AlN boules confirmed a very low oxygen contamination of 100 ppm wt. Cathodoluminescence studies showed well defined near band edge emission peak located slightly above 6 eV.

Copyright

References

Hide All
[1] Monemar, B., J. Mater. Sci.: Mater. in Electronics 10 (1999) 227.
[2] Liu, L., Edgar, J., Mater. Sci. Eng. R37 (2002) 61.
[3] Ambracher, O., J. Phys. D: Appl. Phys. 31 (1998) 2653.
[4] Schlesser, R., Dalmau, R., Sitar, Z., J. Crys. Growth 241 (2002) 416.
[6] Schlesser, R., Dalmau, R., Yakimova, R., Sitar, Z., Mat. Res. Symp. Proc. 693 (2001) I941.
[7] Rojo, J. C., Slack, G. A., Morgan, K., Schowalter, L. J., Dudley, M., Mat. Res. Symp. Vol.639 (2001) G1.10.1.
[8] Rojo, J. C., Slack, G. A., Morgan, K., Raghothamachar, B., Dudley, M., Schowalter, L. J., J. Crys. Growth 231 (2001) 317.
[9] Slack, G. A., Schowalter, L. J., Morelli, D., Freitas, J. A. Jr, J. Crys. Growth 246 (2002) 287.
[10] Bickermann, M., Epelbaum, B. M., Winnacker, A., Phys. Stat. Sol. (a), in press.
[11] Noveski, V., Schlesser, R., Mahajan, S., Beaudoin, S., Sitar, Z., Submitted to J. Crys. Growth.
[12] Wu, B., Zhang, H., Noveski, V., Schlesser, R., Mahajan, S., Beaudoin, S.. Sitar, Z., to be submitted to J. Crys. Growth.
[13] Perlin, T., Polian, A., Suski, T., Phys. Rev. (b), 47 (1993) 2874.

Vapor phase transport of AlN in an RF heated reactor: Low and high temperature studies

  • V. Noveski (a1) (a2), R. Schlesser (a1), J. Freitas (a3), S. Mahajan (a2), S. Beaudoin (a4) and Z. Sitar (a1)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed