Hostname: page-component-77c89778f8-m8s7h Total loading time: 0 Render date: 2024-07-19T18:50:24.981Z Has data issue: false hasContentIssue false

Vacuum Ultraviolet and Visible Optical Emission Spectra from Laser Ablation of Graphite at 193 NM: Application to Carbon Nitride Thin Films Deposition

Published online by Cambridge University Press:  15 February 2011

R. Henck
Affiliation:
CNRS, Laboratoire PHASE (UPR 292), BP 20, 67037 Strasbourg Cedex 2, France, fogarassy @phase.c-strasbourg.fr
C. Fuchs
Affiliation:
CNRS, Laboratoire PHASE (UPR 292), BP 20, 67037 Strasbourg Cedex 2, France, fogarassy @phase.c-strasbourg.fr
E. Fogarassy
Affiliation:
CNRS, Laboratoire PHASE (UPR 292), BP 20, 67037 Strasbourg Cedex 2, France, fogarassy @phase.c-strasbourg.fr
J. Hommet
Affiliation:
IPCMS, BP 20, 67037 Strasbourg Cedex 2, France
F. Le Normand
Affiliation:
IPCMS, BP 20, 67037 Strasbourg Cedex 2, France
Get access

Abstract

Optical emission spectra in the ultraviolet and visible range (110-600 nm) were recorded during pulsed ArF laser ablation of graphite targets in vacuum and in low pressure N2 atmospheres. During graphite ablation in vacuo, the recorded spectrum consists only of several atomic lines lying below 300 nm. They are due to radiative transitions from upper carbon excited states down to the fundamental one. The most intense atomic lines are observed at 247.85 nm and near 165.5 and 156 nm. During ablation in increasing nitrogen pressure, the spectra are quickly dominated by the bands of the CN violet system whereas the intensity of the atomic lines only slightly increases. We have observed the bands corresponding to the vibrational sequences Δv = +1 (358.4-369.7 nm), Δv = 0 (384.7-394.4 nm) and Δv = -1 (414.3-421.6 nm). They already appear at nitrogen pressure as low as 0.05 mbar. Their intensity reaches a broad maximum between 0.5 and 0.8 mbar and slowly decreases.Taking into account the results of this optical study, the deposition of carbon nitride thin films has been undertaken. The surface analysis by X-ray photoelectron spectroscopy (XPS) of the obtained C1-xNx deposits shows a correlation law between the nitrogen incorporation (x) and the pressure of nitrogen.

Type
Research Article
Copyright
Copyright © Materials Research Society 1998

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Zhao, X.A., Ong, C.W., Tsang, Y.C., Wong, Y.W., Chan, P.W. and Choy, C.L., Appl. Phys. Lett. 66, p. 2652 (1995).Google Scholar
2. Okoshi, M., Kumagai, H. and Toyoda, K., J. Mater. Res. 12, p. 3376 (1997).Google Scholar
3. Niu, C., Lu, Y.Z. and Lieber, C.M., Science 261, p. 334 (1993).Google Scholar
4. Ren, Z.M., Du, Y.C., Ying, Z.F., Qiu, Y.X., Xiong, X.X., Wu, J.D. and Li, F.M., Appl. Phys. Lett. 65, p. 1361 (1994).Google Scholar
5. Geohegan, D.B. in Pulsed Laser Deposition of Thin Films, edited by Chrisey, D.B. and Hubler, G.K. (Wiley Interscience, New York, 1994), pp. 115165.Google Scholar
6. Scofield, J.H., J. Electron Spectr. Rel. Phen. 8, p. 129 (1976).Google Scholar
7. Seah, M.P. in Practical Surface Analysis by Auger and X-Ray Photoelectron Spectroscopy, edited by Seah, M.P. and Briggs, D. (John Wiley and Sons, Chichester, 1983), p. 181.Google Scholar
8. Seah, M.P., Surface Interface Anal. 20, p. 243 (1993).Google Scholar
9. Weast, R.C., Handbook of Chemistry and Physics, (CRC Press, Boca Raton, 1980-1981).Google Scholar
10. Candler, C., Atomic Spectra and the Vector Model, 2nd ed. (Hilger & Watts Ltd, London, 1964), p. 359.Google Scholar
11. Moore, C.E., Atomic Energy Levels, (US Government Printing Office, Washington, 1971).Google Scholar
12. Chen, X., Mazumder, J. and Purohit, A., Appl. Phys. A52, pp. 328334 (1991).Google Scholar
13. Aquaviva, S., Caricato, A.P., De Giorgi, M.L., Luches, A. and Perrone, A., Appl. Surf. Science 408, pp.109110 (1997).Google Scholar
14. Rosen, B., Atlas des Longueurs d'Onde Caract6ristiques des Bandes d'Emission et d'Absorption des Molécules Diatomiques, (Hermann, Paris, 1952).Google Scholar
15. Beamson, G. and Briggs, D. in High Resolution XPS on Organic Compounds, (John Wiley and Sons, Chichester, 1992), p. 84.Google Scholar
16. Marton, D., Boyd, K.J., Al-Bayati, A.H., Todorov, S.S. and Rabalais, J.W., Phys. Rev. Lett. 73, p. 118 (1994).Google Scholar