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Uv Laser-Initiated Deposition of Al2O3 Films: The Effect of Surface Irradiation

  • T. F. Deutsch (a1), D. J. Silversmith (a1) and R. W. Mountain (a1)


The effects of 193 and 248 nm UV surface irradiation on the properties of Al2O3 films produced by UV laser-initiated deposition have been investigated using ellipsometry and electrical measurements. The UV irradiated region shows a higher refractive index than the unirradiated regions, indicating that densification has occurred. Energy fluences as low as 1 mJ/cm2, too low to cause significant transient heating, produce measurable effects. The results suggest that UV irradiation may be used to obtain lower deposition temperatures in a variety of deposition systems.



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