Deep level acceptor and donor centers are created in III-V materials by energetic ion bombardments. The controlled introduction of these centers by selective area implantation can be used to provide electrical and optical isolation of neighbouring devices. We will contrast the implant isolation characteristics of GaAs and AlGaAs with materials such as InP and InGaAs, and also with the ternary compounds InGaP and AllnP, for which there has previously been little information. In all of these materials the as implanted resistivity is controlled by hopping conduction processes, with p « e×p (T 0.25). Post-implant annealing can be used to achieve resistivities of > 108 Ωcm in initially highly doped material provided the implant doses are correctly chosen. These defect engineered regions may be made many microns deep by using overlapping multiple-energy keV implants or a single MeV implant. In the latter case a nearly flat damage profile can be achieved over depths typical of HBT, SEED or long-wavelength laser epitaxial thicknesses. Examples of these devices which rely on controlled introduction of deep level defects for their operation will be given.