Hostname: page-component-7c8c6479df-ws8qp Total loading time: 0 Render date: 2024-03-19T08:24:10.206Z Has data issue: false hasContentIssue false

Uniformity and Surface Properties of Diamond Films made by Tilted Oxyacetylene Combustion Flames

Published online by Cambridge University Press:  25 February 2011

W. Zhu
Affiliation:
School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 2263, Republic of Singapore
B. H. Tan
Affiliation:
Institute of Manufacturing Technology, Nanyang Avenue, Singapore 2263, Republic of Singapore.
Z. Yin
Affiliation:
School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 2263, Republic of Singapore
J. Ahn
Affiliation:
School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 2263, Republic of Singapore
H. S. Tan
Affiliation:
School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 2263, Republic of Singapore
Get access

Abstract

High quality, transparent diamond films with relatively large deposition areas have been obtained from oxyacetylene combustion flames at the atmospheric pressure using nozzle tilted at an angle φ) with respect to the Mo substrates. These films are studied using scanning electron microscopy, X-ray diffraction, and Raman spectroscopy. Experimental results show that the surface morphology and microstructure depend strongly on the processing parameters such as the gas mixture ratio of acetylene to oxygen, substrate temperature, and the nozzle angle φ. The uniformity of diamond films have been improved using this tilted combustion flame technique and some problems related with this approach are discussed.

Type
Research Article
Copyright
Copyright © Materials Research Society 1993

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Angus, J. C. and Hayman, C. C., Science, 241, 913 (1988).CrossRefGoogle Scholar
2. Yarbrough, W. A. and Messier, R., Science, 247, 688 (1990).CrossRefGoogle Scholar
3. Zhu, W., Stoner, B. R., Williams, B. E., and Glass, J. T., Proceedings of the EEE, 79, 621 (1991).Google Scholar
4. Hirose, Y. and Knodo, N., 35th Japan Applied Physics Spring Meeting Extended Abstracts,. Tokyo, 1988, p. 434.Google Scholar
5. Cappelli, M. A. and Paul, P. H., J. Appl. Phys., 67, 2597 (1990).CrossRefGoogle Scholar
6. Okada, K., Komatsu, S., Ishigaki, T., Matsumoto, S., and Moriyoshi, Y., J. Appl. Phys., 71, 4920 (1992).CrossRefGoogle Scholar
7. Zhu, W., Ahn, J., Tan, B. H., and Tan, H. S., J. Cryst. Growth, in press.Google Scholar
8. Zhu, W., Tan, B. H., Ahn, J., and Tan, H. S., Diamond, J. & Related Materials, in press.Google Scholar
9. Knight, D. S. and White, W. B., J. Mater. Res., 4, 385 (1989).CrossRefGoogle Scholar