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Ultrasound Emission from Porous Silicon: Efficient Thermoacoustic Function as a Depleted Nanocrystalline System

  • N. Koshida (a1), T. Nakajima (a1), M. Yoshiyama (a1), K. Ueno (a1), T. Nakagawa (a1) and H. Shinoda (a1)...

Abstract

It is demonstrated that luminescent porous silicon (PS) exhibits an efficient thermoacoustic effect owing to its extremely low thermal conductivity. The experimental device is composed of a patterned thin Al film electrode (30 nm thick), a microporous PS layer (10–50 μm thick), and a single-crystalline Si (c-Si) wafer. The PS layer was formed by a conventional anodization technique. When an electrical input is provided to the Al electrode as a sinusoidal current followed by Joule's heating, a significant acoustic pressure is produced in front of the device as a result of an efficient heat exchange between PS and air. The output amplitude is in inverse proportion to the square root of the input frequency (0.1-100 kHz) as predicted by a theoretical analysis. The observed effect is a novel useful function of PS as a completely depleted nanocrystalline system.

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