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Ultrafast Imaging of Ultraviolet Laser Ablation and Etching of Polymethyl Methacrylate

Published online by Cambridge University Press:  21 February 2011

Bodil Braren
Affiliation:
IBM, T. J. Watson Research Center Yorktown Heights, NY 10598
R. Srinivasan
Affiliation:
IBM, T. J. Watson Research Center Yorktown Heights, NY 10598
Kelly G. Casey
Affiliation:
IBM, T. J. Watson Research Center Yorktown Heights, NY 10598
Mildred Yeh
Affiliation:
IBM, T. J. Watson Research Center Yorktown Heights, NY 10598
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Abstract

Ablation and etching of the surface of polymethyl methacrylate (=PMMA) by pulses of 248 nm laser radiation ∼20 ns full width at half maximum (FWHM) have been probed by pulses of visible laser radiation (596 nm; < 1 ns FWHM). The results were recorded photographically in real time with a set time delay between the 248 nm ablation pulse and the 596 nm probe pulse. Modification of the surface structure of the polymer at a fluence ∼ 3 J/cm2 is first visible at 12 ns and appears to be complete in ∼ 60 ns. The first manifestation of the ablation does not occur until the UV pulse is over and consists of a nearly transparent shock-wave that has an initial velocity of 6 ∼ 104 cm/sec. Solid material from the ablated zone begins to leave the surface at ∼150 - 200 ns and reaches a maximum in intensity at 6 µs, continuing for ∼ 20 µs. The average velocity of the solid material, which is probably a low molecular weight polymer of PMMA, is 1.5 ∼ 104 cm/sec. The conclusion to be drawn from the present work is that the signal measured by photoacoustic detectors does not coincide with the bulk of the material leaving the surface.

Type
Research Article
Copyright
Copyright © Materials Research Society 1990

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References

REFERENCES

1. Puliafito, C. A., Stern, D., Krueger, R. R. and Mandel, E. R., Arch. of Ophth., 105, 1255 (1987).Google Scholar
2. Simon, P., Appl. Phys., B 48, 253 (1989).Google Scholar
3. Kim, H., Postlewaite, J. C., Zyung, T., and Dlott, D. D., J. Appl. Phys., 64, 2955 (1988).Google Scholar
4. Davis, G. M. and Gower, M. C., J. Appl. Phys., 61, 2090 (1987).Google Scholar
5. Kuper, S. and Stuke, M., Appl. Phys., B44, 199 (1987).Google Scholar
6. Dyer, P. E. and Srinivasan, R., J. Appl. Phys., 66, 2608 (1989).Google Scholar
7. Hansen, S. G., J. Appl. Phys., 66, 1411 (1989).Google Scholar
8. Srinivasan, R., Braren, B., Dreyfus, R. W., Hadel, L., and Seeger, D. E., J. Opt. Soc., A3, 785 (1986).Google Scholar
9. Dyer, P. E. and Srinivasan, R., J. Appl. Phys., 48, 445 (1986).Google Scholar