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T-Site Trapped Molecular Hydrogen in Hot Wire a-Si:H

  • J. Herberg (a1), P. A. Fedders (a1), D. J. Leopold (a1), R. E. Norberg (a1) and R. E. Schropp (a2)...

Abstract

Proton NMR and proton-29Si double resonance NMR have been performed on hot wire a-Si:H films deposited from SiH4. Results are compared with those from conventional plasma enhanced chemical vapor deposition a-Si:H. Proton nutational angle studies and proton-29Si spin-echo double resonance (SEDOR) signals at 80 and 294 K indicate that a significant proton resonance population arises from T-site-trapped molecular H2. The hot wire films also display a ≥80 kHz FWHM uperbroad proton line and a sharp feature diamagnetically shifted by 25 ppm.

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1. Norberg, R. E., Leopold, D. J., Fedders, P. A., Borzi, R., Chan, P. H., Herberg, J., and Tomic, N., Mat. Res. Soc. Symp. Proc. Vol. 609, A.26.2.1 (2000).
2. Fedders, P. A., Leopold, D. J., Chan, P. H., Borzi, R., and Norberg, R. E., Phys. Rev. Lett. 85, 401 (2000).
3. Chan, P. H., Ph.D. Thesis, Washington University 1993 (unpublished).
4. Baugh, J., Han, D., Kleinhammes, A., and Wu, Y., Appl. Phys. Lett. 78, 466 2001).

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