Skip to main content Accessibility help

Transmission Characterization of Drilled Alternating-Layer Three-Dimensional Photonic Crystals

  • Eiichi Kuramochi (a1), Masaya Notomi (a1), Itaru Yokohama (a1), Jun-ichi Takahashi (a2), Chiharu Takahashi (a2) (a3), Takayuki Kawashima (a4) and Shojiro Kawakami (a4)...


We propose a new three-dimensional photonic crystal structure or drilled alternating-layer photonic crystal (DALPC), which can be fabricated by a combination of the deposition of alternating layers of dielectric films and one-time dry etching. Our band calculation predicts that the DALPC has a photonic band gap (PBG) in all directions. We fabricated a Si/SiO2 DALPC by electron beam lithography, bias sputtering, and fluoride-gas electron cyclotron resonance etching. We measured the light transmission of the DALPC sample in both the in-plane and vertical directions. We observed a transmission minimum around the 1.4-µm-wavelength for all measured directions and TE/TM polarizations, which demonstrated a potential of the DALPC as a three-dimensional PBG material.



Hide All
1. Joannopoulos, J. D., Meade, R. D., and Winn, J. N., Photonic Crystals (Princeton University Press, New Jersey, 1996).
2. Blanco, A., Chomski, E., Grabtchak, S., Iblsate, M., John, S., Leonard, S. W., Lopez, C., Meseguer, F., Mlguez, H., Mondla, J. P., Ozin, G. A., Toader, O., and Driel, H. M. van, Nature 405, 437 (2000)
3. Vlasov, Y. A., Bo, X-Z., Strum, J. C., and Norris, D. J., Nature 414, 289 (2001)
4. Ho, K. M., Chan, C. T., Soukoulis, C. M., Biswas, R., and Sigalas, M., Solid State Commun. 89, 413 (1994).
5. Sozuer, H. S. and Dowling, J. P., J. Mod. Opt. 41, 231 (1994).
6. Lin, S. Y., Fleming, J. G., Hetherington, D. L., Smith, B. K., Biswas, R., Ho, K. M., Sigalas, M. M, Zubrzycki, W., Kurtz, S. R., and Bur, J., Nature 394, 251 (1998)
7. Noda, S., Tomoda, K., Yamamoto, N. and Chutinan, A.. Science 289, 604606, 2000.
8. Notomi, M., Tamamura, T., Kawashima, T., and Kawakami, S., Appl. Phys. Lett. 77, 4256 (2000).
9. Kuramochi, E., Notomi, M., Tamamura, T., Kawashima, T., Kawakami, S., Takahashi, J., and Takahashi, C., J. Vac. Sci. Technol. B18, 3510 (2000).
10. Kawakami, S., Electron. Lett. 33, 1260 (1997).
11. Kawakami, S., Kawashima, T. and Sato, T.. Appl. Phys. Lett. 74, 463465, 1999.
12. Takahashi, C., Jin, Y., Nishimura, K., and Matsuo, S., Jpn. J. Appl. Phys. 39,36723676, 2000.


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed