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Towards a High Quality Factor DC Electric Field Switchable Barium Strontium Titanate Solidly Mounted Resonator

  • George N. Saddik (a1), Junwoo Son (a2), Susanne Stemmer (a3) and Robert A. York (a4)

Abstract

Barium strontium titanate solidly mounted resonators (SMR) were fabricated with three different acoustic Bragg reflectors (ABR) on a sapphire substrate. The three devices had ABR structures consisting of W/SiO2/W/SiO2, Mo/SiO2/Mo/SiO2, and Pt/SiO2/Pt/SiO2 respectively. The s-parameters of all three devices were measured. The results showed that the quality factor increased as a function of the material in the ABR structure. The quality factor for the devices with tungsten, molybdenum and platinum in the ABR structures are 101, 88, and 31, respectively. This investigation showed how the material in the ABR structure can contribute to the acoustic loss in the device.

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References

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Keywords

Towards a High Quality Factor DC Electric Field Switchable Barium Strontium Titanate Solidly Mounted Resonator

  • George N. Saddik (a1), Junwoo Son (a2), Susanne Stemmer (a3) and Robert A. York (a4)

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