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Top Layer Oxidation In Mo/SI Multilayer X-Ray Mirror
Published online by Cambridge University Press: 15 February 2011
Abstract
Reflectivity of Mo/Si multilayer x-ray mirrors with molybdenum as the top layer decreased over time when stored in air due to oxidation of the top Mo layer to MoO3 and MoO2. High reflectivity can be maintained by having silicon as the top layer. In fact, reflectivity of Si-top multilayer coatings increase slightly during the first few days after deposition.
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- Copyright © Materials Research Society 1993
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