Hostname: page-component-76fb5796d-r6qrq Total loading time: 0 Render date: 2024-04-25T16:32:24.957Z Has data issue: false hasContentIssue false
  • English
  • Français

Titania/Silica Sol-Gel Films: Comparison of Techniques for Thin Film Thickness Measurement

Published online by Cambridge University Press:  28 February 2011

S. M. Melpolder ,
A. W. West ,
M. P. Cunningham  and
R. Sharma
S. M. Melpolder
Affiliation:
Eastman Kodak Company,Rochester,New York,14650–2019.
A. W. West
Affiliation:
Eastman Kodak Company,Rochester,New York,14650–2019.
M. P. Cunningham
Affiliation:
Eastman Kodak Company,Rochester,New York,14650–2019.
R. Sharma
Affiliation:
Eastman Kodak Company,Rochester,New York,14650–2019.
Get access

Abstract

Two techniques for thin film measurement were compared: an optical method combining ellipsometry and reflectance spectroscopy, and cross-sectional transmission electron microscopy. These techniques were used to measure the absolute thicknesses of titania/silica sol-gel films in the size range 0.1 to 0.8 microns. The relative advantages and disadvantages of these methods will be described in this study.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 180: Symposium A – Better Ceramics Through Chemistry IV , 1990 , 387
Copyright
Copyright © Materials Research Society 1990

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Yoldas, B.E. and O'Keeffe, T.W., Appl. Opt. 18, 3133 (1979).Google Scholar
2. Dislich, H., Sol-Gel Thechnology for Thin Films. Fibers, Preforms. Electronics. and Specialty Shapes, Edited by Klein, L.C. (1988) p. 50.Google Scholar
3. Yoldas, B.E., J. Non-Crystalline Solids 38,39, 81 (1980).Google Scholar
4. Schroeder, H., Phys. Thin Films 5, 87 (1969).Google Scholar
5. Brinker, C.J. and Harrington, M.S., Solar Energy Materials.5, 159 (1981).Google Scholar
6. Lukosz, W. and Tiefenthaler, K., Opt. Letters, 8 (10), 537 (1983).Google Scholar
7. Beier, W., Goktas, A.A. and Frischat, G. H., Journal Non-crystalline Solids, 100, 531 (1988).Google Scholar
8. Belhadj., F. Sempere, R. and Phallipou, J., Journal Non-crystalline Solids 82, 417 (1986).Google Scholar
9. Sakka, S., Kamiya, K. and Yoko, Y. in Inorganic and Organometallic polymers, Edited by Zeldin, M. et al. (ACS Symposium series 360 1987).Google Scholar
10. Pettit, R.B., Ashley, C.S., Reed, S.T. and Brinker, C.J., Sol-Gel Technology for Thin Films. Figers. Preforms, Electronics and Specialty Shapes, Edited by Klein, L.C. (1988) p. 80.Google Scholar
11. Yamamoto, Y., Kamiya, K. and Sakka, S., Yogyo-Kyokai-Shi, 90 (6), 328 (1982).Google Scholar
12. Cheng, J. and Wang, D., Journal Non-crystalline Solids, 100, 288 (1988).Google Scholar
13. Yoldas, B.E., Applied Optics, 21 (16), 2960 (1982).Google Scholar
14. Emili, M. et al. Journal Non-crystalline Solids 74, 129 (1985).Google Scholar
15. Gonzalez-Oliver, C.J.R., James, P.F. and Rawson, H., Journal Non-crystalline Solids 48, 129 (1982).Google Scholar
16. Nogami, M. and Moriya, Y., Yogyo-Kyokai-Shi 85, 59 (1977).Google Scholar
17. Mohallen, N.D.S. and Aegerter, M.A., Journal Non-crystalline Solids 100, 526 (1988).Google Scholar
18. Melpolder, S.M. and Coltrain, B.K. in Better Ceramics Through Chemistry, edited by Brinker, C.J. et al. (Mater. Res. Soc. Proc. 121, Pittsburgh, PA 1988) pp. 811.Google Scholar
19. McCrackin, F. L., NBS Technical Note 479, “A Fortran Program for Analysis of Ellipsometer Measurements”,1969.Google Scholar
20. Rouard, P., Annales de Physique, 7, 291 (1937).Google Scholar
21. Vasicek, A., Optics of Thin Films, Interscience Publishers, (1960).Google Scholar
21 Vasicek, A., Optical study of a thin absorbing film on a metal surface, in Ellipsometry in the Measurement of Surfaces and Thin Films, Edited by Passaglia, E. et al. , NBS Miscellaneous Publication 256 (1963).Google Scholar
22. Drude, P., Ann. Physik. 272, 532 (1889).Google Scholar
22a Drude, P., Ann. Physik. 272, 865 (1889).Google Scholar
22b Drude, P., Ann. Physik. 275, 481 (1890).Google Scholar