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Time-Dependent Bias Stress-Induced Instability of SiC MOS Devices

  • Aivars Lelis (a1), Daniel Habersat (a2), Fatimat Olaniran (a3), Brian Simons (a4), James McGarrity (a5), F. Barry McLean (a6) and Neil Goldsman (a7)...

Abstract

We have observed a gate-bias stress induced instability in both the threshold voltage of SiC MOSFETs and the flatband voltage of SiC MOS capacitors. The magnitude of this bias stress-induced instability generally increases linearly with log time, with no saturation of the effect observed, even out to 100,000 seconds. The magnitude also increases with increasing gate field. A positive gate-bias stress causes a positive shift and a negative gate-bias stress causes a negative shift, consistent with electron tunneling into or out of oxide traps near the SiC / SiO2 interface as opposed to mobile ions drifting across the gate oxide. The effect is repeatable.

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1 Powell, S.K., Goldsman, N., McGarrity, J.M., and Bernstein, J., J. Appl. Phys. 92 (2002), p 4053.
2 Lelis, A.J., Habersat, D., Lopez, G., McGarrity, J., McLean, F.B., and Goldsman, N., Materials Science Forum (Proceedings of the 2005 ICSCRM), to be published.
3 Deal, B.E., IEEE Trans. Elec. Dev., ED–27 (1980), p. 606.
4 Dhar, S., Pantelides, S.T., Feldman, L.C., Isaacs-Smith, T., Wang, S., and Williams, J.R., Materials Science Forum (Proceedings of the 2005 ICSCRM), to be published.
5 Habersat, D., Lelis, A.J., Lopez, G., McGarrity, J., and McLean, F.B., Materials Science Forum (Proceedings of the 2005 ICSCRM), to be published.
6 Chang, K.C., Nuhfer, N.T., Porter, L.M., and Wahab, Q., Appl. Phys. Lett., 77:14 (2000), p 2186.
7 Jernigan, G.G., Stahlbush, R.E., Das, M.K., Cooper, J.A. Jr., and Lipkin, L.A., Appl. Phys. Lett., 74:10 (1999), p 1448.

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Time-Dependent Bias Stress-Induced Instability of SiC MOS Devices

  • Aivars Lelis (a1), Daniel Habersat (a2), Fatimat Olaniran (a3), Brian Simons (a4), James McGarrity (a5), F. Barry McLean (a6) and Neil Goldsman (a7)...

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