Skip to main content Accessibility help
×
Home

Thin Nano- and Microcrystalline CVD Diamond Films for Micro-channel Cooling: Thermal and Elastic Properties

  • Robbe Salenbien (a1), Jan Sermeus (a1), Paulius Pobedinskas (a2), Christ Glorieux (a1) and Ken Haenen (a2) (a3)...

Abstract

Thin nano- to microcrystalline diamond (N/MCD) films were deposited on silicon substrates using plasma enhanced microwave chemical vapor deposition. Selected layers were covered with a thin metal layer of Cr to enhance their optical absorption characteristics for photothermal and photoacoustic experiments. A heterodyne diffraction method was used to investigate the thermoelastic signatures of the N/MCD layers. While the dispersion of surface acoustic waves turned out to be difficult to determine due to high optical scattering from the diamond crystallites, it was found that a diamond film of ~ 2 μm thick is enhancing the thermal diffusion along the surface.

Copyright

References

Hide All
1. Twitchen, D.J., Pickles, C.S.J., Coe, S.E., Sussmann, R.S., Hall, C.E., Diamond Relat. Mater. 10 (3-7), 731735 (2001).
2. Wörner, E., Pleuler, E., Wild, C., Koidl, P., Diamond Relat. Mater. 12 (3-7), 744748 (2003).
3. Williams, O.A., Nesládek, M., Daenen, M., Michaelson, S., Hoffman, A., Ōsawa, E., Haenen, K., Jackman, R.B., Diamond Relat. Mater. 17(7-10), 10801088 (2008).
4. Philip, J., Hess, P., Feygelson, T., Butler, J.E., Chattopadhyay, S., Chen, K.H., Chen, L.C., J. Appl. Phys. 93 (4), 21642171 (2005).
5. Wild, C., Koidl, P., Müller-Sebert, W., Walcher, H., Kohl, R., Herres, N., Locher, R., Samlenski, R., Brenn, R., Diamond Relat. Mater. 2 (2-4), 158168 (1993).
6. Van de Rostyne, K., Glorieux, C., Gao, W., Gusev, V., Nesládek, M., Lauriks, W., Thoen, J., phys. stat. sol. (a) 172, 105111 (1999).
7. Williams, O.A., Douhéret, O., Daenen, M., Haenen, K., Osawa, E., Takahashi, M., Chem. Phys. Lett. 445 (4-6), 255258 (2007).
8. Côte, R., Van der Donck, T., Celis, J.-P., Glorieux, C., Thin Solid Films 517, 26972701 (2009).

Keywords

Thin Nano- and Microcrystalline CVD Diamond Films for Micro-channel Cooling: Thermal and Elastic Properties

  • Robbe Salenbien (a1), Jan Sermeus (a1), Paulius Pobedinskas (a2), Christ Glorieux (a1) and Ken Haenen (a2) (a3)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed