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Thin Film Ruthenium Oxide - Iridium Oxide Thermocouples

Published online by Cambridge University Press:  15 February 2011

Kenneth G. Kreider
Kenneth G. Kreider*
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD 20899
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Abstract

Ruthenium oxide and iridium oxide have outstanding resistance to corrosion. These oxides are also excellent electrical conductors and have been used as biochemical charge injection electrodes. Their unique electrical and electrochemical properties have also led to their consideration as high temperature pH electrodes. Thin films are the most useful form for these applications as they permit the miniaturization of fast response sensors and electrodes.

This study was used to characterize the thermoelectric and electrical conductance parameters of ruthenium and iridium oxide sputtered thin films. The electric and thermoelectric properties of the thin films were found to be sensitive to the annealing temperature of the sputtered oxides. The properties of the film are related to the microstructure, stoichiometry and crystal structure as determined by x-ray diffraction. Heat treatments were used to stabilize the thermoelectric response and the thermal coefficient of resistivity.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 234: Symposium V – Modern Perspectives on Thermoelectrics and Related Materials , 1991 , 205
Copyright
Copyright © Materials Research Society 1991

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References

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