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Thin Film Microelectromechanical Systems

Published online by Cambridge University Press:  01 February 2011

V. Chu ,
J. Gaspar  and
J.P. Conde
V. Chu
Affiliation:
INESC Microsistemas and Nanotecnologias, Rua Alves Redol 9, 1000-029 Lisbon, Portugal
J. Gaspar
Affiliation:
INESC Microsistemas and Nanotecnologias, Rua Alves Redol 9, 1000-029 Lisbon, Portugal Departament of Materials Engineering, Instituto Superior Técnico, Av. Rovisco Pais, 1049-001 Lisbon, Portugal
J.P. Conde
Affiliation:
Departament of Materials Engineering, Instituto Superior Técnico, Av. Rovisco Pais, 1049-001 Lisbon, Portugal
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Abstract

This paper presents the fabrication and characterization of MEMS structures on glass substrates using thin film silicon technology and surface micromachining. The technology developed to process bridge and cantilever structures as well as the electromechanical characterization of these structures is discussed. This technology can enable the expansion of MEMS to applications requiring large area and/or flexible substrates. The main results for the characterization of the movement of the structures are as follows: (1) in the quasi-DC regime and at low applied voltages, the response is linear with the applied dc voltage. Using an electromechanical model which takes into account the constituent materials and geometry of the bilayer, it is possible to extract the deflection of the structures. This estimate suggests that it is possible to control the actuation of these structures to deflections on the sub-nanometric scale; (2) resonance frequencies of up to 20 MHz have been measured on hydrogenated amorphous silicon (a-Si:H) bridge structures with quality factors (Q) of 70-100 in air. The frequency depends inversely on the square of the structure length, as predicted by the mechanical model; and (3) using an integrated permanent magnet/magnetic sensor system, it is possible to measure the structure movement on-chip and to obtain an absolute calibration of the deflection of the structures.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 715: Symposium A – Amorphous and Heterogeneous Silicon-Based Films-2002 , 2002 , A12.3
Copyright
Copyright © Materials Research Society 2002

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