We have formed thin films of ferroelectric and dielectric materials (BaTiO3, SrTiO3 and CaTiO3) by pulsed laser deposition on various kinds of substrates such as SrTiO3, LaAlO3 and MgO(100) single crystals. All the films can be formed epitaxially on the SrTiO3 substrate with c-axis orientation by choosing suitable conditions. The electrical behavior of these films such as dielectric constant and spontaneous polarization is quite similar to that of single crystals in bulk samples. The remanent polarization of BaTiO3 and PbTiO3 films are about 15 μC/cm2 and 80 μC/cm2, respectively. The value of 80 μC/cm2 is almost the same as that theoretically predicted and have not been obtain in the bulk samples. The unique advantage of the pulsed laser deposition technique is its ability to produce highly oriented stoichiometric films that show good electrical properties.