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Thickness Mode Resonance of PZT Coatings on a Substrate

Published online by Cambridge University Press:  10 February 2011

M. Lukacs ,
T. Olding ,
M. Sayer  and
S. Sherrit
M. Lukacs
Affiliation:
Department of Physics, Queen's University, Kingston Ontario, Canada
T. Olding
Affiliation:
Department of Physics, Queen's University, Kingston Ontario, Canada
M. Sayer
Affiliation:
Department of Physics, Queen's University, Kingston Ontario, Canada
S. Sherrit
Affiliation:
Department of Physics, Royal Military College of Canada, Kingston, Ontario, Canada
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Abstract

The analytical solution of the wave equation for a piezoelectric layer supported by a substrate is presented. Using the appropriate boundary conditions, the impedance for a piezoelectric layer driven in the thickness axis is derived and expressed in terms of the mechanical, electrical and piezoelectrical properties of the two materials. This solution allows for the extension of the free resonator IEEE impedance techniques and provides a nondestructive method for determining the material parameters of a piezoelectric film with mechanical support. The validity and universality of the model is demonstrated by measurements on composite sol gel PZT coatings within the thickness range of 15-70μm on aluminum substrates of varying thickness, and by simulating the mass loading of a quartz thickness resonator.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 493: Symposium U – Ferroelectric Thin Film VI , 1997 , 397
Copyright
Copyright © Materials Research Society 1998

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References

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