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Thermodynamic Analysis and Purification for Source Materials in Sublimation Crystal Growth of Aluminum Nitride

Published online by Cambridge University Press:  31 January 2011

Li Du  and
James Edgar
Li Du
Affiliation:
lidu@ksu.edu
James Edgar
Affiliation:
edgarjh@k-state.edu, Kansas State University, Chemical Engineering, Manhattan, Kansas, United States
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Abstract

Source material purification according to a thermodynamic analysis is reported for the sublimation crystal growth of aluminum nitride in an inert reactor. OAlOH is strongly favored over all other possible oxygen containing compounds in both the Al-O-H-N and Al-O-H-C-N systems, while Al2O, proved to be the most favorable oxygen containing gas species for Al-O-N system in previous study, become secondary favorable gas species. A low temperature (<1200 °C) treatment is effective in eliminating oxygen and hydrogen from the source powder. Carbon monoxide is another important oxygen containing gas species in the Al-O-H-C-N system, and is favored over Al2O at certain temperature and pressure. Carbothermal reduction with intentionally added carbon (graphite) can further reduce the oxygen concentration. Experiments show that high-temperature sintering minimizes the oxygen concentration and reduces the specific surface area of the source. With only 5.5% of mass loss, the purification produced a source with low O, H, and C concentrations of 0.018 wt%, 6ppm, and 0.006wt%.

Keywords

III-Vcrystal growthsintering
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1202: Symposium I – III-Nitride Materials for Sensing, Energy Conversion and Controlled Light-Matter Interactions , 2009 , 1202-I05-08
Copyright
Copyright © Materials Research Society 2010

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