Skip to main content Accessibility help
×
Home

Thermal Equilibration and Growth of Doped Amorphous Silicon

  • J. Kakalios (a1), R. A. Street (a1), C. C. Tsai (a1) and R. Weisfield (a1)

Abstract

The relation between the thermal equilibration of the defect structure in n-type doped hydrogenated amorphous silicon (a-Si:H) and the deposition conditions has been investigated. When the deposition rate is increased by raising the rf power the equilibration time constants become longer, though the thermal equilibrium processes are qualitatively similar to those in samples grown under optimal conditions. Models relating the slower equilibration rate to the deposition-induced microstructure are explored.

Copyright

References

Hide All
1. Fritzsche, H., Fundamental Physics of Amorphous Semiconductors, ed. by Yonezawa, F. (Springer-Verlag, Berlin), 1 (1987).
2. Tsai, C. C., Knights, J. C., Chang, G. and Wacker, B., J. Appl. Phys. 59, 2998 (1986).
3. Street, R. A., Kakalios, J. and Hayes, T. M., Phys. Rev. B 34, 3030 (1986).
4. Street, R. A., Kakalios, J., Tsai, C. C. and Hayes, T. M., Phys. Rev. B 35, 1316 (1987).
5. Street, R. A., Tsai, C. C., Kakalios, J. and Jackson, W. B., Philos. Mag. B (in press).
6. Street, R. A., Knights, J. C. and Biegelsen, D. K., Phys. Rev. B 18, 1880 (1978).
7. Knights, J. C. and Lujan, R. A., Appl. Phys. Lett. 35, 244 (1979).
8. Ast, D. G. and Brodsky, M. H., Inst. Phys. Conf. Ser. 43, 1159 (1979).
9. Kakalios, J., Street, R. A. and Jackson, W. B., to be published.
10. Stutzmann, M., Jackson, W. B. and Tsai, C. C., Phys. Rev. B 32, 23 (1985).
11. Stutzmann, M. and Jackson, W. B., Solid State Commun. (to be published).
12. Reimer, J. A., Vaughan, R. W. and Knights, J. C., Phys. Rev. Lett. 44, 193 (1980).
13. Baum, J., Gleason, K. K., Pines, A., Garroway, A. N. and Reimer, J. A., Phys. Rev. Lett. 56, 1377 (1986).

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed