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Thermal and Mechanical Properties of Diamond-Like a-C:H Films

Published online by Cambridge University Press:  25 February 2011

G. Amato ,
G. Benedetto ,
L. Boarino ,
F. Demichelis ,
C. F. Pirri ,
R. Spagnolo  and
A. Tagliaferro
G. Amato
Affiliation:
Istituto Elettrotecnico Nazionale Galileo Ferraris Strada delle Cacce 91, 10135, Torino -, Italy
G. Benedetto
Affiliation:
Istituto Elettrotecnico Nazionale Galileo Ferraris Strada delle Cacce 91, 10135, Torino -, Italy
L. Boarino
Affiliation:
Istituto Elettrotecnico Nazionale Galileo Ferraris Strada delle Cacce 91, 10135, Torino -, Italy
F. Demichelis
Affiliation:
Politecnico di Torino, Dipartimento di Fisica Corso Duca degli Abruzzi 24, 10129, Torino -, Italy
C. F. Pirri
Affiliation:
Politecnico di Torino, Dipartimento di Fisica Corso Duca degli Abruzzi 24, 10129, Torino -, Italy
R. Spagnolo
Affiliation:
Istituto Elettrotecnico Nazionale Galileo Ferraris Strada delle Cacce 91, 10135, Torino -, Italy
A. Tagliaferro
Affiliation:
Politecnico di Torino, Dipartimento di Fisica Corso Duca degli Abruzzi 24, 10129, Torino -, Italy
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Abstract

Diamond-like amorphous carbon and hydrogenated amorphous carbon films (DLC) prepared by rf sputtering have been characterized by means of measurements of optical gap, hardness and Young's modulus. Preliminary results of the application of the photothermal displacement technique (PTD) are also reported, confirming that this method can in principle be applied for a more complete characterization of DLC films at room temperature and low temperatures.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 270: Symposium M – Novel Forms of Carbon , 1992 , 475
Copyright
Copyright © Materials Research Society 1992

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References

REFERENCES

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