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Thermal and Mechanical Properties of Diamond-Like a-C:H Films

  • G. Amato (a1), G. Benedetto (a1), L. Boarino (a1), F. Demichelis (a2), C. F. Pirri (a2), R. Spagnolo (a1) and A. Tagliaferro (a2)...

Abstract

Diamond-like amorphous carbon and hydrogenated amorphous carbon films (DLC) prepared by rf sputtering have been characterized by means of measurements of optical gap, hardness and Young's modulus. Preliminary results of the application of the photothermal displacement technique (PTD) are also reported, confirming that this method can in principle be applied for a more complete characterization of DLC films at room temperature and low temperatures.

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[1] Olmstead, A., Amer, N. M., Kohn, S., Fournier, D. and Boccara, A. C., Appl. Phys. A 32, 141 (1983).
[2] Welsch, E., J. Mod. Optics 1, 2159 (1991).
[3] Demichelis, F., Giacchello, G., Pirri, C. F. and Tagliaferro, A., Proc. of the SPIE Int. Soc. for Opt. Ing., vol. 1534 (Diamond Optics), 140 (1991).
[4] Amato, G., Benedetto, G., Boarino, L. and Spagnolo, R., to appear in J. Mod. Optics.
[5] Gupta, D. Das, Demichelis, F., Pirri, C. F. and Tagliaferro, A., Phys.Rev. B, 43, 2131 (1991).
[6] Demichelis, F., Pirri, C. F. and Tagliaferro, A., Phys. Rev. B 45 (1991) (in press).
[7] Touloukian, Y. S., Powell, R. W., Ho, C. Y. and Klemens, P. G., Thermophysical Properties of Matter, vol.2, IFI/Plenum Press, New York 1970.

Thermal and Mechanical Properties of Diamond-Like a-C:H Films

  • G. Amato (a1), G. Benedetto (a1), L. Boarino (a1), F. Demichelis (a2), C. F. Pirri (a2), R. Spagnolo (a1) and A. Tagliaferro (a2)...

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