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Theory of Hydrogen in Semiconductors

  • Chris G. van de walle (a1)

Abstract

This paper treats the subject of hydrogen in semiconductors from various perspectives. First, a brief historical overview is given. Then, some basic principles governing the interaction between hydrogen and semiconductors are outlined. Finally, specific examples will emphasize the impact of hydrogen on technological applications. While the general treatment applies to interactions of hydrogen with any semiconductor, the applications will focus mainly on hydrogen interacting with silicon.

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Theory of Hydrogen in Semiconductors

  • Chris G. van de walle (a1)

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