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Theoretical modeling for laser cleaning of micro-particles from solid surface

Published online by Cambridge University Press:  10 February 2011

Y. F. Lu ,
W. D. Song ,
M. H. Hong ,
D. S. H. Chan  and
T. S. Low
Y. F. Lu
Affiliation:
Laser Microprocessing Laboratory Department of Electrical Engineering and Data Storage Institute, National University of Singapore, 10 Kent Ridge Crescent, Singapore 119260
W. D. Song
Affiliation:
Laser Microprocessing Laboratory Department of Electrical Engineering and Data Storage Institute, National University of Singapore, 10 Kent Ridge Crescent, Singapore 119260
M. H. Hong
Affiliation:
Laser Microprocessing Laboratory Department of Electrical Engineering and Data Storage Institute, National University of Singapore, 10 Kent Ridge Crescent, Singapore 119260
D. S. H. Chan
Affiliation:
Laser Microprocessing Laboratory Department of Electrical Engineering and Data Storage Institute, National University of Singapore, 10 Kent Ridge Crescent, Singapore 119260
T. S. Low
Affiliation:
Laser Microprocessing Laboratory Department of Electrical Engineering and Data Storage Institute, National University of Singapore, 10 Kent Ridge Crescent, Singapore 119260
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Abstract

In laser cleaning of micro-particles from solid surface, the adhesion force between the particles and the substrate surface and the thermal expansion of both particles and substrate play important roles in determining the threshold laser fluence. Taking Van der Waals force and cleaning force due to fast thermal expansion of particles and substrate surface induced by pulsed laser irradiation into account, a cleaning model was established for removal of tiny particles from substrate surfaces. The cleaning condition and cleaning threshold can be obtained from this model. This model can qualitatively and quantitatively predict how the laser cleaning process depending on laser incident direction, laser wavelength, particle size, particle material and substrate material. Theoretical predictions have been verified by the experimental results. Laser cleaning of micro-particle has wide applications in microelectronics and magnetic recording industries.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 501: Symposium FF – Surface Controlled Nanoscale Materials for High-Added… , 1997 , 399
Copyright
Copyright © Materials Research Society 1998

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References

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