Hostname: page-component-848d4c4894-sjtt6 Total loading time: 0 Render date: 2024-07-07T11:07:57.406Z Has data issue: false hasContentIssue false
  • English
  • Français

A Theoretical Model for Steam Laser Cleaning

Published online by Cambridge University Press:  15 February 2011

Y. F. Lu ,
Y. Zhang ,
W. D. Song  and
T. S. Low
Y. F. Lu
Affiliation:
Laser Microprocessing Laboratory, Department of Electrical Engineering and Data Storage Institute, National University of Singapore, 10 Kent Ridge Crescent, Singapore 119260
Y. Zhang
Affiliation:
Laser Microprocessing Laboratory, Department of Electrical Engineering and Data Storage Institute, National University of Singapore, 10 Kent Ridge Crescent, Singapore 119260
W. D. Song
Affiliation:
Laser Microprocessing Laboratory, Department of Electrical Engineering and Data Storage Institute, National University of Singapore, 10 Kent Ridge Crescent, Singapore 119260
T. S. Low
Affiliation:
Laser Microprocessing Laboratory, Department of Electrical Engineering and Data Storage Institute, National University of Singapore, 10 Kent Ridge Crescent, Singapore 119260
Get access

Abstract

A theoretical model for removal of tiny particles from solid surface covered with a thin liquid film by laser cleaning is established by taking adhesion force and cleaning force into account. When pulsed laser irradiates on the solid surface coated with a thin liquid film, a sheet of liquid near the liquid/substrate interface can be superheated through thermal diffusion. The rapid growth of vapor bubbles inside the superheated liquid can generate transient stress wave with high pressure, large enough to expel micron and sub-micron particles from the contaminated surface. By calculating the adhesion force and cleaning force, the cleaning threshold of laser fluence can be predicted from this theoretical model. The difference between cleaning force and adhesion force increases quickly along with the laser fluence and leads to higher cleaning efficiency.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 526: Symposium Y – Advances in Laser Ablation of Materials , 1998 , 409
Copyright
Copyright © Materials Research Society 1998

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Imen, K., Lee, S. J. and Allen, S. D., Appl. Phys. Lett. 58, 203 (1991).Google Scholar
2. Zapka, W., Ziemlich, W. and Tam, A. C., Appl. Phys. Lett. 58, 2217 (1991).Google Scholar
3. Lu, Y. F. and Aoyagi, Y., Jpn. J. Appl. Phys. 33, L430 (1994).Google Scholar
4. Lu, Y. F., Song, W. D. and Hong, M. H., J. Appl. Phys. 80, 499 (1996).Google Scholar
5. Kelly, J. D. and Hovis, F. E., Microelectron. Eng. 20, 159 (1993).Google Scholar
6. Park, H. K., Grigoropoulos, C. P. and Leung, W. P., IEEE Trans. on Component, Packaging and Manufacturing Tech. 17, 631 (1994).Google Scholar
7. Tam, A. C., Leung, W. P., Zapka, W. and Ziemlich, W., J. Appl. Phys. 71, 3515 (1992).Google Scholar
8. Lee, S. J., Imen, K. and Allen, S. D., Appl. Phys. Lett. 61, 2314 (1992).Google Scholar
9. Mittal, K. L., Particles on Surfaces, (Plenum Press, New York, 1988), Vol. 1, pp. 129–139.Google Scholar
10. Yavas, O., Leiderer, P. and Park, H. K., Appl. Phys. A58, 407 (1994).Google Scholar
11. Zapka, W., Ziemlich, W., leung, W. P. and Tam, A. C., Microelectron. Eng. 20, 171 (1993).Google Scholar
12. Carey, V. P., Liquid-Vapor Phase-Change Phenomena, (Hemisphere Publishing Corporation, Washington, 1992) Chapter 6.Google Scholar
13. Prosperetti, A. and Plesset, M. S., J. Fluid. Mech. 85(2), 349 (1978).Google Scholar
14. Hutchins, D. A., Dewhurst, R. J. and Palmer, S.B., Ultrasonics, 19, 103 (1981).Google Scholar
15. Lyamshev, L. M. and Naugol'nykh, K. A., Sov. Phys. Acoust. 27, 357 (1981).Google Scholar
16. Knight, C. J., AIAA J. 17, 519 (1979).Google Scholar
17. Feiock, F. D. and Goodwin, L. K., J. Appl. Phys. 43, 5061 (1972).Google Scholar
18. Yavas, O., Schilling, A., Bischof, J. and Leiderer, P., Appl. Phys. A64, 331 (1997).Google Scholar
19. Edmonds, P. D. and Dunn, F., Methods of Experimental Physics-Ultrasonics, (Academic, New York, 1981) Vol. 19.Google Scholar