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TEM/STEM Sample Preparation for the Investigation of Solid State Structures: Applications to Electronic Devices and Computer Components

  • Richard E. Flutie (a1)

Extract

There has been a resurgence of the TEM/STEM being applied to the inspection and microanalysis of solid state electronic structures and devices. As the IC industry scaled down to submicron lines and spaces the IC designer, manufacturing processor and failure analyst required better “eyes” than the SEM could give. In addition to the image improvement, the TEM/STEM provided the microanalysis capability of microelectron diffraction (<30 angstroms) and sub-micron EDXA of ultra-thinned samples.

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References

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1. Ham, W.E., Abrahams, M.S., Blanc, J., and Buiocchi, C.J., RCA Review, Vol.38, September 1977.
2. Sheng, Tan-Tan and Chang, Chuan C., IEEE Transactions on Electron Devices, Vol. ED–23, No. 6, June 1976.
3. Bravman, John C. and Sinclair, Robert, Journal of Electron Microscopy Technique 1:5361 (1984).
4. Marcus, R.B. and Sheng, T.T., Transmission Electron Microscopy of Silicon VLSI Circuits and Structures, John Wiley & Sons 1983.
5. Flutie, Richard, proceedings of “Tutorial on Microsectioning”, IEEE International Reliability Physics Symposium, Las Vegas, NV, April 1984.
6. Flutie, Richard, proceedings of the International Society for Testing and Failure Analysis, Los Angeles, CA, October 1984.
7. Ultra Sonic Cutter Gatan, Inc. 780 Commonwealth Drive Warrendale, PA 15086 (412) 776–5260
Slurry Cup Cutter South Bay Technology 5209 Tyler Avenue Temple City, CA 91780 (818) 442–1839
Slurry Cup Cutter VCR Group 68 Meadowbrook Drive San Francisco, CA 94132 (415) 731–9483
8. Customized Vise Structure Probe 535 E. Gay Street P. O. Box 342 West Chester, PA 19381 (215) 436–5400
9. Epoxy (2 hours - #04004) for vise Epoxy (5 minutes - #04001) for Mo Polymeric Systems, Inc. P. O. Box 150, Route 724 Parkerford, PA 19457 (215) 495–7022
10. Precision Grinding Tool, Ion Milli Gatan, Inc. 780 Commonwealth Drive Warrendale, PA 15086 13. (412) 776–5260
11. Molybdenum Support Ring E. Fjeld Co., Inc. P.O. Box 5068 Billerica, MA 01822 (617) 667–1416
12. Jet Thinning Instruments ly ring are available from all three venders listed in Reference 7.
13. Ultrastructure, Inc. 1850 N. Greenville Avenue Richardson, TX 75081 (214) 644–1271 Dr. Russell Pinizzoto Commercial TEM Consulting Laboratory

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