Skip to main content Accessibility help
×
Home

Tem Structural Studies on Zn+ Implanted and As+ /Zn+ Dually Implanted GaAs

  • E. Morita (a1), J. Kasahara (a1), M. Arai (a1) and S. Kawado (a1)

Abstract

Microdefects in Cr-doped SI LEC (001) GaAs wafers which were implanted with Zn+ or As /Zn and capless-annealed in an As ambient have been studied by means of transmission electron microscopy. Most of the microdefects in Zn +- implanted GaAs specimens were identified as precipitates and stacking fault tetrahedra (SFTs). Every SFT was accompanied by a precipitate at the apex. Most of the precipitates were distributed from Rp to Rp + 2∆Rp. Two types (α and β) of SFTs were differentiated by the arrangement of atoms in the core of the stair-rod partial dislocations bounding the periphery of the SFTs in a polar Frystal. β-SFTs were, however, predominantly formed in Zn+ implanted GaAs specimens. Dual implantation of As+ and Zn+ suppressed the formation of SFTs, but not that of precipitates. The formation of SFTs was found to be influenced by the deviation in stoichiometry.

Copyright

References

Hide All
1. Morita, E., Kasahara, J. and Kawado, S., submitted to Jpn. J. Appl. Phys.
2. Kasahara, J., Arai, M. and Watanabe, N., J. Appl. Phys. 50, 541 (1979).
3. Silcox, J. and Hirsch, P.B., Phil. Mag. 4, 72 (1959).
4. Gomez, A.M. and Hirsch, P.B., Phil. Mag. 38, 733 (1978).
5. Christel, L.A.: Ph.D.thesis, Stanford Univ., 1981.
6. Kasahara, J., Taira, K., Kato, Y., Arai, M. and Watanabe, N., Jpn. J. Appl. Phys. 22, L373 (1983).
7. Gibbons, J.F., Johnson, W.S. and Mylroie, S.W.: Projected Range Statistics (Dowden Huchinson and Ross, Stroudsburg, Pa., 1975).
8. Kasahara, J., Sakurai, H., Kato, Y. and Watanabe, N., Jpn. J. Appl. Phys. 21, L103 (1982).

Tem Structural Studies on Zn+ Implanted and As+ /Zn+ Dually Implanted GaAs

  • E. Morita (a1), J. Kasahara (a1), M. Arai (a1) and S. Kawado (a1)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed