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TEM and SEM Studies of MOCVD-Grown GaP on Si

  • M. M. Ai-Jassim (a1), J. M. Olson (a1) and K. M. Jones (a1)

Abstract

GaP and GaP/GaAsP epitaxial layers have been grown on Si substrates by metal-organic chemical vapor deposition (MOCVD). These layers were characterized by SEM and TEM plan-view and cross-sectional examination. At growth temperatures ranging from 600° C to 800° C, the initial stages of growth were dominated by three-dimensional nucleation. TEM studies showed that at high temperatures the nuclei were generally misoriented with respect to each other yielding, upon coalescence, polycrystalline layers. The growth of single-crystal layers was achieved by nucleating a 30–50 nm layer of GaP at 500° C, followed by annealing and continued growth at 750 ° C. The defect density in these structures was investigated as a function of various growth parameters and substrate conditions. A high density of structural defects was generated at the Si/GaP interface. The use of 2° off (100) Si substrates resulted in GaP layers free of antiphase domains. These results and their implications are discussed.

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1. Blakeslee, A. E. and Mitchell, K. W., U.S. Patent No. 4 278 474 (1981).
2. Gonda, S., Matsushima, Y., Mukai, S., Makita, Y., Igaarashi, O., Japanese J. of Appl. Phys. 17, 1043 (1978).
3. Wright, S. L., Kroemer, H., Inada, M., J. Appl. Phys. 55, 2916 (1984).
4. Beneking, H., Roehle, H., Mischel, P., Schul, G., Gallium Arsenide and Related Compounds (1976), Inst. Phys. Conf. Ser. Mo. 33a, 51 (1977).
5. Pogge, H. B., Kemlag, B. M., Broadie, R. W., J. Crystal Growth 37, 13 (1977).
6. Su, Y. K., J. Phys. D: Appl. Phys. 15, 2325 (1982).
7. Samuelson, L., Omling, P., Grimmeiss, H. G., J. Crystal Growth 68, 340 (1984).
8. Masahiro, Akiyama, Yoshihiro, Kawarada, Katsuzo, Kaminishi, J. Crystal Growth 68, 21 (1984).

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