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A Technique for the Examination of Surface Effects in Aluminum Nitride Ceramics

  • M. Grant Norton (a1), Stuart McKernan (a1) and C. Barry Carter (a1)

Abstract

A specimen preparation technique for the study of surface reactions and thin-film effects in aluminum nitride ceramic substrates is described. The technique uses specially prepared electron-transparent thin-foil substrates. These substrates can be examined directly in the electron microscope without the need for any further specimen preparation.

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3. Norton, M.G., Yang, T.K.A., Kotula, P.G., Rugg, K.L., McKernan, S. and Carter, C.B., in Electronic Packaging Materials Science, edited by Lillie, E.D., Jaccodine, R.J., Ho, P., and Jackson, K., Materials Research Society Symposium Proceedings, 203, (1991 in press)
4. Simpson, Y.K. and Carter, C.B., Phil. Mag. A, 53, Ll (1986)
5. Tietz, L.A., Summerfelt, S.R., English, G.R. and Carter, C.B., Appl. Phys. Lett., 55, 1202 (1989)
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7. Norton, M.G. and Carter, C.B., J. Mater. Res., 5, 2762 (1990)
8. Norton, M.G., Summerfelt, S.R. and Carter, C.B., Appl. Phys. Lett., 56, 2246 (1990)
9. Soda, Tokuyama, 1875 South Grant Street, Suite 250, San Mateo CA 94402

A Technique for the Examination of Surface Effects in Aluminum Nitride Ceramics

  • M. Grant Norton (a1), Stuart McKernan (a1) and C. Barry Carter (a1)

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