Skip to main content Accessibility help

A Tale of Two Precursors: UHV-CVD of TiO2 From Titanium Nitrate and Titanium Isopropoxide

  • Wayne L. Gladfelter (a1), Charles J. Taylor (a1), David C. Gilmer (a1), Daniel G. Colombo (a1), G. D. Wilk (a2), Stephen A. Campbell (a3) and Jeff Roberts (a1)...


A side-by-side comparison of the TiO2 deposition kinetics and the corresponding film microstructures using titanium(IV) isopropoxide and anhydrous titanium(IV) nitrate was conducted at low pressures (< 10−4 Torr) in an ultrahigh vacuum chemical vapor deposition reactor. Titanium(IV) nitrate exhibited a lower activation energy of reaction (Er= 98 kJ/mol) which allowed deposition at lower temperatures compared to titanium(IV) isopropoxide (Er= 135 kJ/mol). Comparison of the microstructures of films deposited at similar temperatures revealed significant differences in the reaction rate limited kinetic regime. As the growth rates of the two precursors converged in the flux-limited regime, the respective microstructures became indistinguishable.



Hide All
1 Yan, J., Gilmer, D. C., Campbell, S. A., Gladfelter, W. L., Schmid, P. G., J. Vac. Sci. Technol. B, 14, 1706 (1996).10.1116/1.589214
2 Campbell, S. A., Gilmer, D. C., Wang, X.-C., Hsieh, M.-T., Kim, H.-S., Gladfelter, W. L., and Yan, J., IEEE Trans. Electron Devices, 44, 104 (1997).10.1109/16.554800
3 Gilmer, D. C., Colombo, D. G., Taylor, C. J., Roberts, J., Haugstad, G., Campbell, S. A. Kim, H.-S., Wilk, G. D., Gribelyuk, M. A., Gladfelter, W. L., Chem. Vap. Deposition, 4, 9 (1998).10.1002/(SICI)1521-3862(199801)04:01<9::AID-CVDE9>3.3.CO;2-V
4 Chen, S., Masen, M. G., Gysling, H. J., Paz-Pujalt, G. R., Blanton, T. N., Castro, T., Chen, K. M., Fictorie, C. P., Gladfelter, W. L., Franciosi, A., Cohen, P. I., and Evans, J. F., J. Vac. Sci. Technol. A, 11, 2419 (1993).10.1116/1.578587
5 Kim, H.-S., Gilmer, D. C., Campbell, S. A., and Polla, D. L., Appl. Phys. Lett., 69, 3860 (1996).10.1063/1.117129


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed