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A Systematic TEM and Rheed Investigation of the MBE Growth of InxGa1−xAs a Function of Composition

  • S.P. Edirisinghe (a1), A.E. Staton-Bevan (a1), D.W. Pashley (a1), P. Fawcett (a2) and B.A. Joyce (a2)...

Abstract

0.15µm epilayers of InxGa1−xAs grown on GaAs (001) by MBE, having In concentrations in the range x = 0.05 - 0.30, have been investigated using RHEED and TEM. RHEED patterns indicate a 2-D growth mode for low In concentrations changing to Stranski-Krastanov growth for x > 0.30. TEM showed misfit dislocations for x > 0.05 only, which were found to relieve only a small part of the misfit strain. Although threading dislocations were rarely found in the epilayers, dislocations originating at the interface and penetrating the buffer layer were observed for 0.1 < x < 0.25.

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A Systematic TEM and Rheed Investigation of the MBE Growth of InxGa1−xAs a Function of Composition

  • S.P. Edirisinghe (a1), A.E. Staton-Bevan (a1), D.W. Pashley (a1), P. Fawcett (a2) and B.A. Joyce (a2)...

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